Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices
2018 ◽
Vol 106
(12)
◽
pp. 2232-2245
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2000 ◽
Vol 209
(2-3)
◽
pp. 463-470
◽
2006 ◽
Vol 5
(2)
◽
pp. 023011
◽