Wafer-scale fabrication of ultralow-loss silicon nitride nonlinear photonic circuits

2020 ◽  
Author(s):  
Junqiu Liu ◽  
Jijun He ◽  
Rui Ning Wang ◽  
Guanhao Huang ◽  
A. S. Raja ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Photonic Circuits ◽  
Wafer Scale

scholarly journals High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits

2021 ◽  
Author(s):  
Junqiu Liu ◽  
Guanhao Huang ◽  
Rui Ning Wang ◽  
Jijun He ◽  
Arslan S. Raja ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
High Yield ◽  
Photonic Circuits ◽  
Wafer Scale

scholarly journals High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits

2021 ◽  
Author(s):  
Junqiu Liu ◽  
Guanhao Huang ◽  
Rui Ning Wang ◽  
Jijun He ◽  
Arslan S. Raja ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
High Yield ◽  
Photonic Circuits ◽  
Wafer Scale

scholarly journals Growth of Aluminum Nitride on a Silicon Nitride Substrate for Hybrid Photonic Circuits

2021 ◽  
Author(s):  
Giulio Terrasanta ◽  
Manuel Müller ◽  
Timo Sommer ◽  
Stephan Gepraegs ◽  
Rudolf Gross ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Aluminum Nitride ◽  
Photonic Circuits

Silicon-nitride waveguide-based integrated photonic circuits for medical diagnostic and other sensing applications

2019 ◽  
Author(s):  
Rainer Hainberger ◽  
Paul Muellner ◽  
Stefan Nevlacsil ◽  
Alejandro Maese-Novo ◽  
Florian Vogelbacher ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Photonic Circuits ◽  
Sensing Applications ◽  
Medical Diagnostic

Nanoporous silicon nitride membranes fabricated from porous nanocrystalline silicon templates

Nanoscale ◽  
2014 ◽  
Vol 6 (18) ◽  
pp. 10798-10805 ◽  
Author(s):  
J. P. S. DesOrmeaux ◽  
J. D. Winans ◽  
S. E. Wayson ◽  
T. R. Gaborski ◽  
T. S. Khire ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Nanocrystalline Silicon ◽  
Nitride Film ◽  
Silicon Nitride Film ◽  
Free Standing ◽  
Nanoporous Silicon ◽  
Wafer Scale

Free standing ultrathin nanoporous silicon nitride membranes are fabricated on a wafer scale by transferring the pores from porous nanocrystalline silicon into a silicon nitride film by reactive ion etch.

scholarly journals Silicon and silicon nitride photonic circuits for spectroscopic sensing on-a-chip [Invited]

2015 ◽  
Vol 3 (5) ◽  
pp. B47 ◽  
Author(s):  
Ananth Z. Subramanian ◽  
Eva Ryckeboer ◽  
Ashim Dhakal ◽  
Frédéric Peyskens ◽  
Aditya Malik ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Photonic Circuits

scholarly journals Ultra-narrow-linewidth Al_2O_3:Er^3+ lasers with a wavelength-insensitive waveguide design on a wafer-scale silicon nitride platform

2017 ◽  
Vol 25 (12) ◽  
pp. 13705 ◽  
Author(s):  
Purnawirman ◽  
Nanxi Li ◽  
Emir Salih Magden ◽  
Gurpreet Singh ◽  
Neetesh Singh ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Narrow Linewidth ◽  
Wafer Scale ◽  
Waveguide Design

Integrated Photonic Circuits on Wafer-Scale Diamond-on-Insulator Substrates

CLEO: 2013 ◽  
2013 ◽  
Author(s):  
Patrik Rath ◽  
Christoph Nebel ◽  
Christoph Wild ◽  
Wolfram H.P. Pernice
Keyword(s):  
Photonic Circuits ◽  
Wafer Scale

Hybrid Aluminum Nitride Integration on Silicon Nitride Photonic Circuits

2021 ◽  
Author(s):  
Giulio Terrasanta ◽  
Manuel Müller ◽  
Timo Sommer ◽  
Matthias Althammer ◽  
Menno Poot
Keyword(s):  
Silicon Nitride ◽  
Aluminum Nitride ◽  
Photonic Circuits
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