Effects of Etching Holes on Capacitance and Tuning Range in MEMS Parallel Plate Variable Capacitors
2001 ◽
Vol 11
(5)
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pp. 322-329
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2004 ◽
Keyword(s):
2009 ◽
Vol 20
(2)
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pp. 025009
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Keyword(s):
1971 ◽
Vol 29
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pp. 76-77
2010 ◽
Vol 41
(3)
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pp. 247-263
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Keyword(s):
Keyword(s):