Method of increasing gate nitridation and its impact on CMOS devices

Extended Abstracts of International Workshop on Gate Insulator (IEEE Cat. No.03EX765) ◽

10.1109/iwgi.2003.159182 ◽

2003 ◽

Author(s):

V.P. Gopinath ◽

V. Hornback ◽

Y. Le ◽

A. Kamath ◽

L. Duong ◽

...

Download Full-text