Energy spread measurement of electrons from field emitter array for ion beam neutralization

IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479) ◽

10.1109/ivmc.2003.1223101 ◽

2004 ◽

Author(s):

J. Ishikawa ◽

Y. Gotoh ◽

K. Nakamura ◽

H. Tsuji ◽

K. Matsuda ◽

...

Keyword(s):

Ion Beam ◽

Energy Spread ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Modification of field emitter array tip shape by focused ion-beam irradiation

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.588967 ◽

1996 ◽

Vol 14 (3) ◽

pp. 1973 ◽

Cited By ~ 25

Author(s):

M. Takai

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Beam Irradiation ◽

Ion Beam Irradiation ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Emission characteristics of ZrN thin film field emitter array fabricated with ion beam assisted deposition technique

10th International Conference on Vacuum Microelectronics ◽

10.1109/ivmc.1997.627660 ◽

1997 ◽

Keyword(s):

Thin Film ◽

Ion Beam ◽

Emission Characteristics ◽

Deposition Technique ◽

Field Emitter ◽

Ion Beam Assisted Deposition ◽

Emitter Array ◽

Field Emitter Array

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Modification of field emitter array (FEA) tip shape by focused ion beam irradiation

IVMC '95. Eighth International Vacuum Microelectronics Conference. Technical Digest (Cat. No.TH8012) ◽

10.1109/ivmc.1995.486988 ◽

2002 ◽

Author(s):

M. Takai ◽

T. Kishimoto ◽

M. Yamashita ◽

H. Morimoto

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Beam Irradiation ◽

Ion Beam Irradiation ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Emission characteristics of ZrN thin film field emitter array fabricated by ion beam assisted deposition technique

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589916 ◽

1998 ◽

Vol 16 (2) ◽

pp. 829 ◽

Cited By ~ 28

Author(s):

M. Nagao

Keyword(s):

Thin Film ◽

Ion Beam ◽

Emission Characteristics ◽

Deposition Technique ◽

Field Emitter ◽

Ion Beam Assisted Deposition ◽

Emitter Array ◽

Field Emitter Array

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Manufacturing a patternable metallized substrate for tungsten ultralong field emitter array by use of the double ion beam deposition method

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.588964 ◽

1996 ◽

Vol 14 (3) ◽

pp. 1963

Author(s):

G. Y. Liu

Keyword(s):

Ion Beam ◽

Deposition Method ◽

Field Emitter ◽

Ion Beam Deposition ◽

Emitter Array ◽

Field Emitter Array ◽

Beam Deposition

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Metal-free and gasless space charge compensation of low energy ion beam by using surface-carbonized silicon field emitter array

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3271159 ◽

2010 ◽

Vol 28 (2) ◽

pp. C2D5-C2D10 ◽

Cited By ~ 2

Author(s):

Mitsuaki Takeuchi ◽

Yasuhito Gotoh ◽

Hiroshi Tsuji ◽

Junzo Ishikawa ◽

Shigeki Sakai

Keyword(s):

Space Charge ◽

Ion Beam ◽

Charge Compensation ◽

Low Energy ◽

Field Emitter ◽

Metal Free ◽

Emitter Array ◽

Field Emitter Array

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Field Emitter Array RF Amplifier Development Project. Cathode Technology Development. Phase 1

10.21236/ada280514 ◽

1992 ◽

Author(s):

Ching-Tzong Sune ◽

Gary W. Jones

Keyword(s):

Technology Development ◽

Phase 1 ◽

Development Project ◽

Development Phase ◽

Field Emitter ◽

Rf Amplifier ◽

Emitter Array ◽

Field Emitter Array

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Field Emitter Array RF Amplifier Development Project. Phase 1. Option 1.

10.21236/ada306512 ◽

1994 ◽

Author(s):

Gary McGuire ◽

W. Devereux

Keyword(s):

Phase 1 ◽

Development Project ◽

Field Emitter ◽

Rf Amplifier ◽

Emitter Array ◽

Field Emitter Array

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Modelling of field emitter array characteristics in diode system

Journal of Physics Conference Series ◽

10.1088/1742-6596/643/1/012122 ◽

2015 ◽

Vol 643 ◽

pp. 012122 ◽

Cited By ~ 2

Author(s):

K A Nikiforov ◽

M F Sayfullin

Keyword(s):

Field Emitter ◽

Emitter Array ◽

Field Emitter Array ◽

Diode System

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Fabrication of a Field Emitter Array with a Built-in Einzel Lens

Japanese Journal of Applied Physics ◽

10.1143/jjap.48.06fk02 ◽

2009 ◽

Vol 48 (6) ◽

pp. 06FK02 ◽

Cited By ~ 25

Author(s):

Masayoshi Nagao ◽

Tomoya Yoshida ◽

Seigo Kanemaru ◽

Yoichiro Neo ◽

Hidenori Mimura

Keyword(s):

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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