Materials deposition and emission characteristics of NbC/Nb field emitter array cathodes

IVMC 2001. Proceedings of the 14th International Vacuum Microelectronics Conference (Cat. No.01TH8586) ◽

10.1109/ivmc.2001.939671 ◽

2002 ◽

Cited By ~ 1

Author(s):

W.A. Mackie ◽

G.L. Cabe ◽

L.A. Southall ◽

Tianbao Xie ◽

P.H. McClelland

Keyword(s):

Emission Characteristics ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Emission characteristics of NbC/Nb field emitter array cathodes

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1527636 ◽

2003 ◽

Vol 21 (1) ◽

pp. 422 ◽

Cited By ~ 6

Author(s):

W. A. Mackie ◽

L. A. Southall ◽

Tianbao Xie ◽

G. L. Cabe ◽

P. H. McClelland

Keyword(s):

Emission Characteristics ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Four-terminal field-emission characteristics of double-gate metallic field-emitter array cathodes with controlled apex sizes fabricated by molding and self-aligned gate process

2009 IEEE International Vacuum Electronics Conference ◽

10.1109/ivelec.2009.5193415 ◽

2009 ◽

Author(s):

S. Tsujino ◽

E. Kirk ◽

T. Vogel ◽

J. Gobrecht

Keyword(s):

Field Emission ◽

Emission Characteristics ◽

Double Gate ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Influence of the composition of a NbN[sub x] thin-film field emitter array on emission characteristics

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.590607 ◽

1999 ◽

Vol 17 (2) ◽

pp. 623 ◽

Cited By ~ 23

Author(s):

M. Nagao ◽

Y. Gotoh ◽

T. Ura ◽

H. Tsuji ◽

J. Ishikawa

Keyword(s):

Thin Film ◽

Emission Characteristics ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Emission characteristics of ZrN thin film field emitter array fabricated with ion beam assisted deposition technique

10th International Conference on Vacuum Microelectronics ◽

10.1109/ivmc.1997.627660 ◽

1997 ◽

Keyword(s):

Thin Film ◽

Ion Beam ◽

Emission Characteristics ◽

Deposition Technique ◽

Field Emitter ◽

Ion Beam Assisted Deposition ◽

Emitter Array ◽

Field Emitter Array

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Comparison of noise and emission characteristics between individually operated NbC/Nb and Ir field emitter array cathodes and etched W[100] emitters

Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737) ◽

10.1109/ivnc.2004.1354988 ◽

2004 ◽

Author(s):

F. Charbonnier ◽

L.A. Southall ◽

W.A. Mackie

Keyword(s):

Emission Characteristics ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Field Emission Phenomena and Applications. Emission Characteristics of Silicon Field Emitter Array.

Hyomen Kagaku ◽

10.1380/jsssj.17.718 ◽

1996 ◽

Vol 17 (12) ◽

pp. 718-723 ◽

Cited By ~ 2

Author(s):

Junji ITOH ◽

Seigo KANEMARU

Keyword(s):

Field Emission ◽

Emission Characteristics ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Emission characteristics of ZrN thin film field emitter array fabricated by ion beam assisted deposition technique

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589916 ◽

1998 ◽

Vol 16 (2) ◽

pp. 829 ◽

Cited By ~ 28

Author(s):

M. Nagao

Keyword(s):

Thin Film ◽

Ion Beam ◽

Emission Characteristics ◽

Deposition Technique ◽

Field Emitter ◽

Ion Beam Assisted Deposition ◽

Emitter Array ◽

Field Emitter Array

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Emission Characteristics of the Molybdenum-Coated Silicon Field Emitter Array

Japanese Journal of Applied Physics ◽

10.1143/jjap.35.l1301 ◽

1996 ◽

Vol 35 (Part 2, No. 10A) ◽

pp. L1301-L1304 ◽

Cited By ~ 4

Author(s):

Heung-Woo Park ◽

Byeong-Kwon Ju ◽

Yun-Hi Lee ◽

Jung-Ho Park ◽

Myung-Hwan Oh

Keyword(s):

Emission Characteristics ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

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Drastic changes in the field emission characteristics of a Mo-tip field emitter array having PH[sub 3]-doped a-Si:H as a resistive layer material throughout vacuum packaging processes in a field emission display

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1508817 ◽

2002 ◽

Vol 20 (5) ◽

pp. 2080 ◽

Cited By ~ 10

Author(s):

J. K. Ha ◽

B. H. Chung ◽

S. Y. Han ◽

J. O. Choi

Keyword(s):

Field Emission ◽

Vacuum Packaging ◽

Emission Characteristics ◽

Field Emission Display ◽

Resistive Layer ◽

Field Emitter ◽

Layer Material ◽

Emitter Array ◽

Field Emitter Array

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Influence of the composition of NbN/sub x/ thin film field emitter array on the emission characteristics

Eleventh International Vacuum Microelectronics Conference. IVMC'98 (Cat. No.98TH8382) ◽

10.1109/ivmc.1998.728770 ◽

2002 ◽

Author(s):

M. Nagao ◽

T. Ura ◽

Y. Gotoh ◽

H. Tsuji ◽

J. Ishikawa

Keyword(s):

Thin Film ◽

Emission Characteristics ◽

Field Emitter ◽

Emitter Array ◽

Field Emitter Array

Download Full-text