High resolution pressure sensor distributed floor for future human-robot symbiosis environments

2003 ◽  
Author(s):  
H. Morishita ◽  
R. Fukui ◽  
T. Sato
Keyword(s):  
High Resolution ◽  
Pressure Sensor

scholarly journals High resolution micro-Pirani pressure sensor gauge with transient response processing

2010 ◽  
Author(s):  
O Legendre ◽  
H Mathias ◽  
E Martincic ◽  
M Zhang ◽  
J Juillard ◽  
...  
Keyword(s):  
High Resolution ◽  
Transient Response ◽  
Pressure Sensor

Realization of Miniature Air Data System Based on Silicon Micro Pressure Sensor

2012 ◽  
Vol 503-504 ◽  
pp. 1445-1449
Author(s):  
Li Min Chang ◽  
Xiang Bin Yu ◽  
Li Jing Zhang
Keyword(s):  
Mach Number ◽  
High Resolution ◽  
Real Time ◽  
Pressure Sensor ◽  
Pressure Measurement ◽  
High Stability ◽  
Computer Calculation ◽  
High Accuracy ◽  
Data System ◽  
Embedded Computer

In this paper, miniature air data system is designed based on thermally excited resonant silicon micro structural pressure sensor. The system employs thermally excited resonant silicon micro structural pressure sensor for the pressure measurement. Using miniature embedded computer, calculation of the parameters such as height, airspeed and mach number and real-time display by LCD are realized. The volume and weight of this system is only one-twelfth of the original. In addition, it has the characteristics of high accuracy, high resolution, high stability and repeatability.

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