Evaluation of Gallium Phosphide Substrate for Solid Immersion Lens

2018 ◽  
Author(s):  
Ikuo Arata ◽  
Masanori Kobayashi ◽  
Shunsuke Matsuda ◽  
Hirotoshi Terada
Keyword(s):  
Gallium Phosphide ◽  
Solid Immersion Lens

Visible Laser Probing (VLP) with GaP Solid Immersion Lens Demonstrating 110 nm Resolution in Common Laser Probing Applications

2016 ◽  
Author(s):  
Travis Eiles ◽  
Patrick Pardy
Keyword(s):  
Gallium Phosphide ◽  
Fault Isolation ◽  
Solid Immersion Lens ◽  
Laser Probing ◽  
Isolation Methods ◽  
Visible Laser ◽  
High Level ◽  
Industry Needs ◽  
Diameter Reduction ◽  
Better Than

Abstract This paper demonstrates a breakthrough method of visible laser probing (VLP), including an optimized 577 nm laser microscope, visible-sensitive detector, and an ultimate-resolution gallium phosphide-based solid immersion lens on the 10 nm node, showing a 110 nm resolution. This is 2x better than what is achieved with the standard suite of probing systems using typical infrared (IR) wavelengths today. Since VLP provides a spot diameter reduction of 0.5x over IR methods, it is reasonable, based simply on geometry, to project that VLP using the 577 nm laser will meet the industry needs for laser probing for both the 10 nm and 7 nm process nodes. Based on its high level of optimization, including high resolution and specialized solid immersion lens, it is highly likely that this VLP technology will be one of the last optically-based fault isolation methods successfully used.

Fabrication and Characterization of Sub-100 µm Diameter Gallium Phosphide Solid Immersion Lens Arrays

2005 ◽  
Vol 44 (5B) ◽  
pp. 3385-3387 ◽  
Author(s):  
Matthew Lang ◽  
Tom D. Milster ◽  
Takahisa Minamitani ◽  
Gregg Borek ◽  
David Brown
Keyword(s):  
Gallium Phosphide ◽  
Solid Immersion Lens ◽  
Fabrication And Characterization

Realization of numerical aperture 2.0 using a gallium phosphide solid immersion lens

1999 ◽  
Vol 75 (26) ◽  
pp. 4064-4066 ◽  
Author(s):  
Qiang Wu ◽  
G. D. Feke ◽  
Robert D. Grober ◽  
L. P. Ghislain
Keyword(s):  
Gallium Phosphide ◽  
Numerical Aperture ◽  
Solid Immersion Lens

Photoemission and OBIRCH Analysis with Solid Immersion Lens (SIL)

2003 ◽  
Author(s):  
Ikuo Arata ◽  
Shigeru Sakamoto ◽  
Yoshiyuki Yokoyama ◽  
Hirotoshi Terada
Keyword(s):  
Gallium Phosphide ◽  
Laser Scanning ◽  
Image Intensifier ◽  
Ccd Camera ◽  
Fault Isolation ◽  
Solid Immersion Lens ◽  
Resistance Change ◽  
Isolation Techniques ◽  
Emission Microscopy ◽  
Cooled Ccd

Abstract SIL(Solid Immersion Lens) is well investigated for optical pickup application because of its capability of high resolution. We applied this technique to microscopy, especially for precise observation of semiconductors. And also we applied it to fault isolation techniques like emission microscopy , OBIRCH(Optical Beam Induced Resistance Change) and TIVA,SEI. We found significant enhancement of resolution and sensitvity by using SIL. Applying this technique to emission microscopy, we should be aware of optical absorption charactristics of SIL lens materials. We investigated proper SIL lens materials for emission microscopy and laser scanning applications, and checked performance of Si(Silicon)-SIL and GaP(Gallium phosphide)-SIL. We also compared combinations of some kinds of SILs and detectors like C-CCD(cooled CCD) camera, MCT(HgCdTe) camera and position sensitive detector with InGaAs photo cathode II(image intensifier).

LUMINESCENCE AND DEEP LEVEL STUDIES OF LINE DISLOCATIONS IN GALLIUM PHOSPHIDE

1983 ◽  
Vol 44 (C4) ◽  
pp. C4-233-C4-241
Author(s):  
B. Hamilton ◽  
A. R. Peaker ◽  
D. R. Wight
Keyword(s):  
Gallium Phosphide ◽  
Deep Level

KINETICS OF FIELD EVAPORATION OF GALLIUM PHOSPHIDE IN THE PRESENCE OF HYDROGEN

1989 ◽  
Vol 50 (C8) ◽  
pp. C8-141-C8-146
Author(s):  
A. GAUSSMANN ◽  
W. DRACHSEL ◽  
J. H. BLOCK
Keyword(s):  
Gallium Phosphide ◽  
Field Evaporation ◽  
Kinetics Of

Next Generation Laser Voltage Probing

2008 ◽  
Author(s):  
Yin S Ng ◽  
William Lo ◽  
Kenneth Wilsher
Keyword(s):  
Phase Modulation ◽  
Phase Locked Loop ◽  
Next Generation ◽  
Solid Immersion Lens ◽  
User Friendliness ◽  
New Developments ◽  
Polarization Difference ◽  
Previous Generation ◽  
Mode Locked Laser ◽  
Optical Laser

Abstract We present an overview of Ruby, the latest generation of backside optical laser voltage probing (LVP) tools [1, 2]. Carrying over from the previous generation of IDS2700 systems, Ruby is capable of measuring waveforms up to 15GHz at low core voltages 0.500V and below. Several new optical capabilities are incorporated; these include a solid immersion lens (SIL) for improved imaging resolution [3] and a polarization difference probing (PDP) optical platform [4] for phase modulation detection. New developments involve Jitter Mitigation, a scheme that allows measurements of jittery signals from circuits that are internally driven by the IC’s onboard Phase Locked Loop (PLL). Additional timing features include a Hardware Phase-Locked Loop (HWPLL) scheme for improved locking of the LVP’s Mode-Locked Laser (MLL) to the tester clock as well as a clockless scheme to improve the LVP’s usefulness and user friendliness. This paper presents these new capabilities and compares these with those of the previous generation of LVP systems [5, 6].

Polarization of the second order Raman spectrum of gallium phosphide

1966 ◽  
Vol 20 (6) ◽  
pp. 610-612 ◽  
Author(s):  
P.G. Marlow ◽  
J.P. Russell ◽  
C.T. Sennett
Keyword(s):  
Raman Spectrum ◽  
Gallium Phosphide ◽  
Second Order
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