Study of the Cluster Ion for Gate Oxide Nitrogen Measurement by TOF-SIMS

2018 ◽  
Author(s):  
Han Wei Teo ◽  
Yun Wang ◽  
Zhi Qiang Mo
Keyword(s):  
Gate Oxide ◽  
Tof Sims ◽  
Cluster Ion

Development of an Argon Gas Cluster Ion Beam for ToF‐SIMS Analysis

2019 ◽  
Vol 40 (9) ◽  
pp. 877-881 ◽  
Author(s):  
Sang Ju Lee ◽  
Chang Min Choi ◽  
Boo Ki Min ◽  
Ji Young Baek ◽  
Jae Yeong Eo ◽  
...  
Keyword(s):  
Ion Beam ◽  
Argon Gas ◽  
Tof Sims ◽  
Cluster Ion ◽  
Sims Analysis ◽  
Gas Cluster Ion Beam

Gate oxide properties investigated by TOF-SIMS profiles on CMOS devices

2003 ◽  
Vol 203-204 ◽  
pp. 437-440 ◽  
Author(s):  
F. Zanderigo ◽  
D. Brazzelli ◽  
S. Rocca ◽  
A. Pregnolato ◽  
A. Grossi ◽  
...  
Keyword(s):  
Gate Oxide ◽  
Tof Sims

scholarly journals Improved mass resolution and mass accuracy in TOF-SIMS spectra and images using argon gas cluster ion beams

2016 ◽  
Vol 11 (2) ◽  
pp. 02A321 ◽  
Author(s):  
Hyun Kyong Shon ◽  
Sohee Yoon ◽  
Jeong Hee Moon ◽  
Tae Geol Lee
Keyword(s):  
Mass Accuracy ◽  
Ion Beams ◽  
Mass Resolution ◽  
Argon Gas ◽  
Tof Sims ◽  
Cluster Ion Beams ◽  
Cluster Ion

TOF-SIMS study of polyester/melamine resin with Ar gas cluster ion beam

2014 ◽  
Vol 46 (S1) ◽  
pp. 100-104 ◽  
Author(s):  
S. Nishinomiya ◽  
K. Toshin ◽  
S. Hayashi ◽  
K. Iuchi ◽  
N. Se ◽  
...  
Keyword(s):  
Ion Beam ◽  
Melamine Resin ◽  
Tof Sims ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam ◽  
Ar Gas

ToF-SIMS and laser-SNMS analysis of Madin–Darby canine kidney II cells with silver nanoparticles using an argon cluster ion beam

2016 ◽  
Vol 11 (2) ◽  
pp. 02A305 ◽  
Author(s):  
Ricarda Nees ◽  
Andreas Pelster ◽  
Martin Körsgen ◽  
Harald Jungnickel ◽  
Andreas Luch ◽  
...  
Keyword(s):  
Silver Nanoparticles ◽  
Ion Beam ◽  
Madin Darby Canine Kidney ◽  
Tof Sims ◽  
Cluster Ion ◽  
Darby Canine Kidney ◽  
Canine Kidney

scholarly journals Ar-gas cluster ion beam in ToF-SIMS for peptide and protein analysis

2020 ◽  
Vol 15 (2) ◽  
pp. 021011 ◽  
Author(s):  
Jin Gyeong Son ◽  
Sohee Yoon ◽  
Hyun Kyung Shon ◽  
Jeong Hee Moon ◽  
Sunho Joh ◽  
...  
Keyword(s):  
Ion Beam ◽  
Protein Analysis ◽  
Tof Sims ◽  
Cluster Ion ◽  
Gas Cluster Ion Beam ◽  
Ar Gas
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