The Origin of so-called ghost modulated reflectance mapping and its application in FA

2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits ◽

10.1109/ipfa.2015.7224462 ◽

2015 ◽

Author(s):

Zhongling Qian ◽

Christof Brillert ◽

Christian Burmer

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