Development and characterization of low power perovskite CO gas sensors

Author(s):  
A. Fort ◽  
M. Mugnaini ◽  
I. Pasquini ◽  
S. Rocchi ◽  
L. Romualdi ◽  
...  
Keyword(s):  
2011 ◽  
Author(s):  
Ada Fort ◽  
Marco Mugnaini ◽  
Santina Rocchi ◽  
Lorenzo Romualdi ◽  
Roberto Spinicci ◽  
...  
Keyword(s):  

2017 ◽  
Vol 42 ◽  
pp. 284-292 ◽  
Author(s):  
Ayah F.S. Abu-Hani ◽  
Falah Awwad ◽  
Yaser E. Greish ◽  
Ahmad I. Ayesh ◽  
Saleh T. Mahmoud

2018 ◽  
Vol 267 ◽  
pp. 597-607 ◽  
Author(s):  
Jae-Hun Kim ◽  
Ali Mirzaei ◽  
Hyoun Woo Kim ◽  
Sang Sub Kim

1987 ◽  
Vol 12 (4) ◽  
pp. 441-447 ◽  
Author(s):  
Duk-Dong Lee ◽  
Byung-Ki Sohn ◽  
Dong-Sung Ma
Keyword(s):  

1998 ◽  
Vol 47 (1-3) ◽  
pp. 205-212 ◽  
Author(s):  
A. Chiorino ◽  
G. Ghiotti ◽  
M.C. Carotta ◽  
G. Martinelli

Sensors ◽  
2021 ◽  
Vol 21 (3) ◽  
pp. 783 ◽  
Author(s):  
Andrea Gaiardo ◽  
David Novel ◽  
Elia Scattolo ◽  
Michele Crivellari ◽  
Antonino Picciotto ◽  
...  

The substrate plays a key role in chemoresistive gas sensors. It acts as mechanical support for the sensing material, hosts the heating element and, also, aids the sensing material in signal transduction. In recent years, a significant improvement in the substrate production process has been achieved, thanks to the advances in micro- and nanofabrication for micro-electro-mechanical system (MEMS) technologies. In addition, the use of innovative materials and smaller low-power consumption silicon microheaters led to the development of high-performance gas sensors. Various heater layouts were investigated to optimize the temperature distribution on the membrane, and a suspended membrane configuration was exploited to avoid heat loss by conduction through the silicon bulk. However, there is a lack of comprehensive studies focused on predictive models for the optimization of the thermal and mechanical properties of a microheater. In this work, three microheater layouts in three membrane sizes were developed using the microfabrication process. The performance of these devices was evaluated to predict their thermal and mechanical behaviors by using both experimental and theoretical approaches. Finally, a statistical method was employed to cross-correlate the thermal predictive model and the mechanical failure analysis, aiming at microheater design optimization for gas-sensing applications.


ACS Omega ◽  
2021 ◽  
Author(s):  
Yulong Chen ◽  
Mingjie Li ◽  
Wenjun Yan ◽  
Xin Zhuang ◽  
Kar Wei Ng ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document