Fabrication of mold master for spiral micro-coil utilizing X-ray lithography of synchrotron radiation
Fabrication of Mold Master for Spiral Microcoil Utilizing X-Ray Lithography of Synchrotron Radiation
2004 ◽
Vol 43
(6B)
◽
pp. 4036-4040
◽
1987 ◽
Vol 48
(C1)
◽
pp. C1-175-C1-181
1980 ◽
Vol 14
(Special2)
◽
pp. 3-14