Synthesis And Characterization Of Alicyclic Polymers With Hydrophilic Groups For 193-nm Single-Layer Resist
1998 ◽
Vol 37
(Part 1, No. 12B)
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pp. 6888-6893
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1993 ◽
Vol 213
(1-2)
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pp. 26-32
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2002 ◽
Vol 167
(1)
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pp. 145-151
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2011 ◽
Vol 133
(12)
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pp. 4367-4376
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