Design, synthesis and characterization of poly(trimethylsilylmethyl methacrylate-co-chloromethyl styrene) for 193-nm exposure
2013 ◽
Vol 65
◽
pp. 60-69
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2020 ◽
pp. 125-134
2018 ◽
Vol 9
(12)
◽
pp. 1223-1229
◽