An optimal scheduling technique for dual-arm cluster tools with buffer modules

2001 IEEE International Conference on Systems, Man and Cybernetics. e-Systems and e-Man for Cybernetics in Cyberspace (Cat.No.01CH37236) ◽

10.1109/icsmc.2001.972958 ◽

2002 ◽

Cited By ~ 1

Author(s):

S. Rostami ◽

B. Hamidzadeh

Keyword(s):

Optimal Scheduling ◽

Cluster Tools ◽

Dual Arm ◽

Scheduling Technique

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An optimal scheduling technique for dual-arm robots in cluster tools with residency constraints

Proceedings of the 39th IEEE Conference on Decision and Control (Cat. No.00CH37187) ◽

10.1109/cdc.2000.912239 ◽

2002 ◽

Cited By ~ 2

Author(s):

S. Rostami ◽

B. Hamidzadeh ◽

D. Camporese

Keyword(s):

Optimal Scheduling ◽

Cluster Tools ◽

Residency Constraints ◽

Dual Arm ◽

Scheduling Technique

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A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2008.2008633 ◽

2010 ◽

Vol 7 (2) ◽

pp. 303-315 ◽

Cited By ~ 118

Author(s):

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Closed Form ◽

Closed Form Solution ◽

Form Solution ◽

Time Constraint ◽

Optimal Scheduling ◽

Cluster Tools ◽

Dual Arm ◽

Residency Time

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Schedulability Analysis and Optimal Scheduling of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2011.2160452 ◽

2012 ◽

Vol 9 (1) ◽

pp. 203-209 ◽

Cited By ~ 135

Author(s):

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Time Variation ◽

Schedulability Analysis ◽

Time Constraint ◽

Optimal Scheduling ◽

Activity Time ◽

Cluster Tools ◽

Dual Arm ◽

Residency Time

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Optimal scheduling of time-constrained single-arm cluster tools with wafer revisiting

2016 13th International Workshop on Discrete Event Systems (WODES) ◽

10.1109/wodes.2016.7497872 ◽

2016 ◽

Cited By ~ 1

Author(s):

ZiCheng Liu ◽

NaiQi Wu ◽

FaJun Yang ◽

Yan Qiao

Keyword(s):

Optimal Scheduling ◽

Cluster Tools

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Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2011.2178023 ◽

2012 ◽

Vol 9 (2) ◽

pp. 446-454 ◽

Cited By ~ 134

Author(s):

Nai Qi Wu ◽

MengChu Zhou

Keyword(s):

Petri Nets ◽

Time Variation ◽

Time Constraint ◽

Activity Time ◽

Modeling Analysis ◽

Cluster Tools ◽

And Control ◽

Dual Arm ◽

Residency Time

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Schedulability and Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting and Residency Time Constraints Based on a Novel Schedule

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmc.2014.2347928 ◽

2015 ◽

Vol 45 (3) ◽

pp. 472-484 ◽

Cited By ~ 24

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Time Constraints ◽

Scheduling Analysis ◽

Cluster Tools ◽

Dual Arm ◽

Residency Time

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A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmca.2012.2230440 ◽

2013 ◽

Vol 43 (5) ◽

pp. 1182-1194 ◽

Cited By ~ 17

Author(s):

NaiQi Wu ◽

MengChu Zhou ◽

Feng Chu ◽

Chengbin Chu

Keyword(s):

Petri Net ◽

Scheduling Strategy ◽

Cluster Tools ◽

Dual Arm

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(Digital twin) Wafer sojourn time fluctuation analysis for time-constrained dual-arm multi-cluster tools with activity time variation

International Journal of Computer Integrated Manufacturing ◽

10.1080/0951192x.2020.1718767 ◽

2020 ◽

pp. 1-17

Author(s):

Fajun Yang ◽

Naiqi Wu ◽

Yan Qiao ◽

Rong Su ◽

Chunjiang Zhang

Keyword(s):

Time Variation ◽

Sojourn Time ◽

Fluctuation Analysis ◽

Activity Time ◽

Digital Twin ◽

Cluster Tools ◽

Time Fluctuation ◽

Dual Arm

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Optimal Scheduling of Complex Multi-Cluster Tools Based on Timed Resource-Oriented Petri Nets

IEEE Access ◽

10.1109/access.2016.2549546 ◽

2016 ◽

Vol 4 ◽

pp. 2096-2109 ◽

Cited By ~ 29

Author(s):

Qinghua Zhu ◽

Naiqi Wu ◽

Yan Qiao ◽

Mengchu Zhou

Keyword(s):

Petri Nets ◽

Optimal Scheduling ◽

Cluster Tools

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Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting

2012 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2012.6386329 ◽

2012 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Scheduling Analysis ◽

Cluster Tools ◽

Dual Arm

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