Performance evaluation of the thin film area in an IC wafer fabrication system using Petri nets

2002 ◽  
Author(s):  
Mu Der Jeng ◽  
Chi Liang Chuang ◽  
Wen Yuan Hung
Keyword(s):  
Thin Film ◽  
Performance Evaluation ◽  
Petri Nets ◽  
Wafer Fabrication ◽  
Film Area

scholarly journals Fabrication and Performance Evaluation of Thin Film RTD Temperature Sensor Array on a Curved Glass Surface

2011 ◽  
Vol 9 (2) ◽  
pp. 34-39 ◽  
Author(s):  
Chul-Hee Ahn ◽  
Hyoung-Hoon Kim ◽  
Sang-Hu Park ◽  
Chang-Min Son ◽  
Jeung-Sang Go
Keyword(s):  
Thin Film ◽  
Performance Evaluation ◽  
Temperature Sensor ◽  
Glass Surface ◽  
Sensor Array ◽  
Curved Glass ◽  
And Performance

Covalent immobilization of DNA and hybridization on microchips by microsecond electric field pulses

2004 ◽  
Vol 820 ◽  
Author(s):  
F. Fixe ◽  
H.M. Branz ◽  
D.M.F. Prazeres ◽  
V. Chu ◽  
J.P. Conde
Keyword(s):  
Thin Film ◽  
Electric Field ◽  
Film Surface ◽  
Covalent Immobilization ◽  
Plastic Substrate ◽  
Field Pulse ◽  
Thin Film Surface ◽  
Large Size ◽  
Electrode Voltage ◽  
Film Area

AbstractSingle square voltage pulses were used to enhance by 7 and 9 orders of magnitude the rate of covalent immobilization and hybridization, respectively, of single stranded DNA probes on a chemically functionalized thin film surface (silicon dioxide) using 2 mm size electrodes. These electrodes were scaled down to 20 μm. Photolithography was used to define the electrode voltage line, ground line, and functionalized thin-film area on a plastic substrate (polyimide). At all electrode dimensions, electric field-assisted DNA immobilization and hybridization can be achieved in the microsecond time scale, far faster than the 2 hr or 16 hr needed for immobilization and hybridization, respectively, without the electric field. Pulse conditions optimized with the large-size electrodes (2 mm) were used in the microelectrodes.

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