Modeling, qualitative analysis, and performance evaluation of the etching area in an IC wafer fabrication system using Petri nets
1998 ◽
Vol 11
(3)
◽
pp. 358-373
◽
Keyword(s):
Keyword(s):
2011 ◽
Vol 49
(15)
◽
pp. 4627-4656
◽
Keyword(s):
2006 ◽
Vol 3
(1)
◽
pp. 29-46
◽
Keyword(s):
2001 ◽
Vol 17
(5)
◽
pp. 619-636
◽
Keyword(s):
2013 ◽
Vol 37
(7)
◽
pp. 4842-4859
◽
Keyword(s):