Investigation of the thermal stress field in a multilevel aluminium metallization in VLSI systems using finite element modelling approach
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2000 ◽
Vol 87
(11)
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pp. 1289-1299
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1993 ◽
Vol 30
(3)
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pp. A165
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2018 ◽
Vol 174
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pp. 49-66
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2010 ◽
Vol 18
(4)
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pp. 271-282
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