Fabrication process of a triple-layer stacked TSV interposer for switch matrix consisting of eight RF chips

2016 ◽  
Author(s):  
Wei Meng ◽  
Yong Guan ◽  
Qinghua Zeng ◽  
Jing Chen ◽  
Yufeng Jin
Keyword(s):  
Fabrication Process ◽  
Triple Layer

Linewidth measurement using the low voltage SEM

1986 ◽  
Vol 44 ◽  
pp. 652-653
Author(s):  
M.G. Rosenfield
Keyword(s):  
Electron Microscope ◽  
Scanning Electron Microscope ◽  
Integrated Circuits ◽  
Secondary Electron ◽  
Low Voltage ◽  
Fabrication Process ◽  
Critical Dimensions ◽  
Linewidth Measurement ◽  
Threshold Technique ◽  
Scanning Electron

Minimum feature sizes in experimental integrated circuits are approaching 0.5 μm and below. During the fabrication process it is usually necessary to be able to non-destructively measure the critical dimensions in resist and after the various process steps. This can be accomplished using the low voltage SEM. Submicron linewidth measurement is typically done by manually measuring the SEM micrographs. Since it is desirable to make as many measurements as possible in the shortest period of time, it is important that this technique be automated.Linewidth measurement using the scanning electron microscope is not well understood. The basic intent is to measure the size of a structure from the secondary electron signal generated by that structure. Thus, it is important to understand how the actual dimension of the line being measured relates to the secondary electron signal. Since different features generate different signals, the same method of relating linewidth to signal cannot be used. For example, the peak to peak method may be used to accurately measure the linewidth of an isolated resist line; but, a threshold technique may be required for an isolated space in resist.

INTEGRATED FABRICATION PROCESS FOR SOLID OXIDE FUELCELLS USING HYBRID PLASMA SPRAYING

1997 ◽  
Vol 1 (1) ◽  
pp. 41-47 ◽  
Author(s):  
Noriyuki Nomoto ◽  
Yoshitomi Okazaki ◽  
Kenji Kuroda ◽  
Shunji Takenoiri ◽  
Toyonobu Yoshida
Keyword(s):  
Plasma Spraying ◽  
Solid Oxide ◽  
Fabrication Process ◽  
Hybrid Plasma

scholarly journals Triple-Layer Nanocomposite Membrane Prepared by Electrospinning Based on Modified PES with Carbon Nanotubes for Membrane Distillation Applications

Membranes ◽  
2020 ◽  
Vol 10 (1) ◽  
pp. 15 ◽  
Author(s):  
Mohamed R. Elmarghany ◽  
Ahmed H. El-Shazly ◽  
Saeid Rajabzadeh ◽  
Mohamed S. Salem ◽  
Mahmoud A. Shouman ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Vinylidene Fluoride ◽  
Bulk Material ◽  
Total Porosity ◽  
Surface Hydrophobicity ◽  
Membrane Distillation ◽  
Nanocomposite Membrane ◽  
High Porosity ◽  
Triple Layer ◽  
Layer Membrane

In this work, a novel triple-layer nanocomposite membrane prepared with polyethersulfone (PES)/carbon nanotubes (CNTs) as the primary bulk material and poly (vinylidene fluoride-co-hexafluoro propylene) (PcH)/CNTs as the outer and inner surfaces of the membrane by using electrospinning method is introduced. Modified PES with CNTs was chosen as the bulk material of the triple-layer membrane to obtain a high porosity membrane. Both the upper and lower surfaces of the triple-layer membrane were coated with PcH/CNTs using electrospinning to get a triple-layer membrane with high total porosity and noticeable surface hydrophobicity. Combining both characteristics, next to an acceptable bulk hydrophobicity, resulted in a compelling membrane for membrane distillation (MD) applications. The prepared membrane was utilized in a direct contact MD system, and its performance was evaluated in different salt solution concentrations, feed velocities and feed solution temperatures. The results of the prepared membrane in this study were compared to those reported in previously published papers. Based on the evaluated membrane performance, the triple-layer nanocomposite membrane can be considered as a potential alternative with reasonable cost, relative to other MD membranes.

scholarly journals Economical rapid-prototyping of aspherical lenses

2019 ◽  
Vol 215 ◽  
pp. 04001 ◽  
Author(s):  
Angelina Müller ◽  
Matthias C. Wapler ◽  
Ulrike Wallrabe
Keyword(s):  
Thermal Expansion ◽  
Rapid Prototyping ◽  
Shape Optimization ◽  
Surface Deformation ◽  
Fabrication Process ◽  
Aspherical Lens ◽  
Laser Structuring ◽  
Aspherical Lenses ◽  
Design Freedom ◽  
Micro Lens

We present a rapid-prototyping process to fabricate aspherical lens arrays based on surface deformation due to thermal expansion of PDMS. Using laser-structuring and molding in combination with an FEM-based shape optimization, we were able to design, fabricate and characterize different micro-lens arrays. This fabrication process can be used for almost any kind of arbitrary lens shape, which allows for a large design freedom for micro lenses.

Effect of low vacuum environment on the fused filament fabrication process

2021 ◽  
Author(s):  
Marshall Quinn ◽  
Ugo Lafont ◽  
Johan Versteegh ◽  
Jian Guo
Keyword(s):  
Fabrication Process ◽  
Fused Filament Fabrication

scholarly journals Waste eggshell membrane-templated synthesis of functional Cu2+–Cu+/biochar for an ultrasensitive electrochemical enzyme-free glucose sensor

RSC Advances ◽  
2021 ◽  
Vol 11 (31) ◽  
pp. 18994-18999
Author(s):  
Linzhi Li ◽  
Tianzeng Huang ◽  
Saijun He ◽  
Xing Liu ◽  
Qi Chen ◽  
...  
Keyword(s):  
Glucose Sensor ◽  
Glucose Sensing ◽  
Fabrication Process ◽  
Eggshell Membrane ◽  
Templated Synthesis ◽  
Free Glucose

The fabrication process of the nonenzyme glucose sensing based Cu2+–Cu+/biochar.

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