High-performance photonic crystal device fabrication process module development for photonics application

2011 ◽  
Author(s):  
Deng Wei ◽  
X. S. Luo ◽  
Ng Leekian ◽  
Yu Mingbin
Keyword(s):  
Photonic Crystal ◽  
High Performance ◽  
Device Fabrication ◽  
Fabrication Process ◽  
Module Development

Microstructure of sputter deposited Ni-Sb ohmic contacts on GaAs

1989 ◽  
Vol 47 ◽  
pp. 450-451
Author(s):  
S. Yegnasubramanian ◽  
V.C. Kannan ◽  
R. Dutto ◽  
P.J. Sakach
Keyword(s):  
High Performance ◽  
Ohmic Contacts ◽  
Surface Defects ◽  
Pure Metal ◽  
Device Fabrication ◽  
Native Oxide ◽  
Metal Thin Films ◽  
Recent Developments ◽  
Different Temperatures ◽  
Sputter Deposited

Recent developments in the fabrication of high performance GaAs devices impose crucial requirements of low resistance ohmic contacts with excellent contact properties such as, thermal stability, contact resistivity, contact depth, Schottky barrier height etc. The nature of the interface plays an important role in the stability of the contacts due to problems associated with interdiffusion and compound formation at the interface during device fabrication. Contacts of pure metal thin films on GaAs are not desirable due to the presence of the native oxide and surface defects at the interface. Nickel has been used as a contact metal on GaAs and has been found to be reactive at low temperatures. Formation Of Ni2 GaAs at 200 - 350C is reported and is found to grow epitaxially on (001) and on (111) GaAs, but is shown to be unstable at 450C. This paper reports the investigations carried out to understand the microstructure, nature of the interface and composition of sputter deposited and annealed (at different temperatures) Ni-Sb ohmic contacts on GaAs by TEM. Attempts were made to correlate the electrical properties of the films such as the sheet resistance and contact resistance, with the microstructure. The observations are corroborated by Scanning Auger Microprobe (SAM) investigations.

Hybrid mesoporous colloid photonic crystal array for high performance vapor sensing

Nanoscale ◽  
2014 ◽  
Vol 6 (11) ◽  
pp. 5680 ◽  
Author(s):  
Ling Bai ◽  
Zhuoying Xie ◽  
Kaidi Cao ◽  
Yuanjin Zhao ◽  
Hua Xu ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
High Performance ◽  
Vapor Sensing
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