Simplified fabrication process of 3D photonic crystal optical transmission filter
2020 ◽
2013 ◽
Vol 538
◽
pp. 297-300
◽
2020 ◽
Vol 92
(2)
◽
pp. 20501
New Design Concept and Fabrication Process for Three-Dimensional Silicon Photonic Crystal Structures
2007 ◽
Vol 46
(2)
◽
pp. 633-637
◽
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