Fine-Pitch (≤10 µm) Direct Cu-Cu Interconnects Using In-Situ Formic Acid Vapor Treatment

2019 ◽  
Author(s):  
SivaChandra Jangam ◽  
Adeel Ahmed Bajwa ◽  
Umesh Mogera ◽  
Pranav Ambhore ◽  
Tom Colosimo ◽  
...  
Keyword(s):  
Formic Acid ◽  
Acid Vapor ◽  
Cu Interconnects ◽  
Fine Pitch ◽  
Vapor Treatment

scholarly journals Hydrophilic Nanoporous Copper Surface Prepared by Modified Formic Acid Vapor Treatment

2021 ◽  
pp. 101620
Author(s):  
Lap-Hong Chan ◽  
Kiyokazu Yasuda ◽  
Jenn-Ming Song ◽  
Tadatomo Suga
Keyword(s):  
Formic Acid ◽  
Copper Surface ◽  
Acid Vapor ◽  
Nanoporous Copper ◽  
Vapor Treatment

Vapor Treatment of Copper Surface Using Organic Acids

2003 ◽  
Vol 766 ◽  
Author(s):  
Kenji Ishikawa ◽  
Teruo Yagishita ◽  
Moritaka Nakamura
Keyword(s):  
Organic Acids ◽  
Formic Acid ◽  
Copper Surface ◽  
Cold Trap ◽  
Acid Vapor ◽  
Acetate Complex ◽  
Infrared Reflection ◽  
Volatile Products ◽  
Vapor Treatment ◽  
Acetic Acids

AbstractThe mechanism for cleaning Cu surfaces using the vapor from organic acids was studied by infrared reflection-absorption spectroscopy (IR-RAS) and by analysis of products collected using a cold-trap placed downstream of a reactor. When formic acid vapor was exposed to oxidized Cu samples heated to about 200°C for about a half an hour, the oxides were reduced. The surface seemed to have a shiny metallic appearance but no Cu-containing volatile products were collected, and the decomposition of formic acid molecules into CO2 was observed. In contrast, using acetic acid vapor, Cu-containing etching products were collected and identified as a dinuclear Cu (II) acetate complex. The vapor treatment using formic and acetic acids can be reduced Cu oxides to have metallic Cu surfaces. Furthermore, controlling temperature and choice of organic acids enabled the advantageous establishment of a control for the reduction in, and etching of, the Cu oxides.

scholarly journals Premilinary Results: Heterogeneous Reaction of Epoxidation Palm Kernal Oil

2019 ◽  
Vol 1 (2-2) ◽  
Author(s):  
Mohd Jumain Jalil ◽  
Intan Suhada Azmi ◽  
Arif Aminuddin Ahmad Zulkifli ◽  
Mohamad Helmi Mohd Asbi
Keyword(s):  
Oleic Acid ◽  
Formic Acid ◽  
Analytical Approach ◽  
Heterogeneous Reaction ◽  
Oxygen Carrier ◽  
Raw Material ◽  
Complete Conversion ◽  
In Situ Techniques ◽  
Oxygen Donor

The epoxidized vegetables oils can be used a raw material for a broad range of products, from pharmaceutical and plastics to paint and adhesives. Epoxidation of oleic acid was carried out by using hydrogen peroxide as an oxygen donor and formic acid as an oxygen carrier in the presence of sulphuric acid act as catalyst. The crude oleic acid contained 75% oleic acid, 12.2% linoleic acid, 6.5% palmitic acid and 7.5% stearic acid, and had an iodine value of 98.99 g/100 g. The epoxidation of oleic acid with almost complete conversion of unsaturated carbon and negligible oxirane cleavage can be obtained by the in situ techniques. An analytical approach for the prediction of the partition coefficient for formic acid between oleic acid and water, dependent on temperature and composition, has been proposed.

An In Situ Infrared Study of CO 2 Hydrogenation to Formic Acid by Using Rhodium Supported on Titanate Nanotubes as Catalysts

2019 ◽  
Vol 4 (14) ◽  
pp. 4206-4216 ◽  
Author(s):  
Jesús Roberto Ruiz‐García ◽  
Juan Carlos Fierro‐Gonzalez ◽  
Brent E. Handy ◽  
Laura Hinojosa‐Reyes ◽  
David A. De Haro Del Río ◽  
...  
Keyword(s):  
Formic Acid ◽  
Titanate Nanotubes ◽  
Infrared Study

The in situ growth of ultrathin Fcc-NiPt nanocrystals on graphene for methanol and formic acid oxidation

2018 ◽  
Vol 47 (42) ◽  
pp. 15131-15140 ◽  
Author(s):  
Liu Lin ◽  
Mengwei Yuan ◽  
Zemin Sun ◽  
Huifeng Li ◽  
Caiyun Nan ◽  
...  
Keyword(s):  
Formic Acid ◽  
Formic Acid Oxidation ◽  
Acid Oxidation ◽  
In Situ Growth ◽  
One Pot ◽  
Electrocatalytic Properties ◽  
In Suit

One-pot strategy to in-suit anchor NiPt nanocrystals on the graphene substrates which show outstanding bifunctional electrocatalytic properties in DMFC and DFAFC.

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