Cost-Efficient Formation of Flexible Pressure Sensor with Micropillar Arrays by Metal-Assisted Chemical Etching for Wearable Electronic Skin

2018 ◽  
Author(s):  
Yougen Hu ◽  
Xinyu Zhang ◽  
Pengli Zhu ◽  
Tao Zhao ◽  
Yuan Zhang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Chemical Etching ◽  
Electronic Skin ◽  
Wearable Electronic ◽  
Metal Assisted Chemical Etching ◽  
Cost Efficient ◽  
Flexible Pressure Sensor ◽  
Micropillar Arrays

scholarly journals High-sensitivity, fast-response flexible pressure sensor for electronic skin using direct writing printing

RSC Advances ◽  
2020 ◽  
Vol 10 (44) ◽  
pp. 26188-26196 ◽  
Author(s):  
Xiaojun Chen ◽  
Xitong Lin ◽  
Deyun Mo ◽  
Xiaoqun Xia ◽  
Manfeng Gong ◽  
...  
Keyword(s):  
Human Computer Interaction ◽  
Pressure Sensor ◽  
High Sensitivity ◽  
Fast Response ◽  
Wearable Electronics ◽  
Direct Writing ◽  
Electronic Skin ◽  
Medical Health ◽  
Flexible Pressure Sensor ◽  
Health Diagnosis

Bionic electronic skin with human sensory capabilities has attracted extensive research interest, which has been applied in the fields of medical health diagnosis, wearable electronics, human–computer interaction, and bionic prosthetics.

Superelastic and large-range pressure sensor with hollow-sphere architectures for wearable electronic skin

2020 ◽  
Vol 29 (4) ◽  
pp. 045014 ◽  
Author(s):  
Ying Huang ◽  
Yang Wang ◽  
Xuehu Sun ◽  
Xiaohui Guo ◽  
Yangyang Zhang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Hollow Sphere ◽  
Large Range ◽  
Electronic Skin ◽  
Wearable Electronic

scholarly journals Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching

2020 ◽  
Vol 10 (1) ◽  
Author(s):  
Yang Qian ◽  
David J. Magginetti ◽  
Seokmin Jeon ◽  
Yohan Yoon ◽  
Tony L. Olsen ◽  
...  
Keyword(s):  
Surface Potential ◽  
Chemical Etching ◽  
High Surface ◽  
Electrochemical Reactions ◽  
Objective Lens ◽  
Chemical Compositions ◽  
Porous Structures ◽  
Porous Si ◽  
Metal Assisted Chemical Etching ◽  
Micropillar Arrays

Abstract Recent progress achieved in metal-assisted chemical etching (MACE) has enabled the production of high-quality micropillar arrays for various optoelectronic applications. Si micropillars produced by MACE often show a porous Si/SiOx shell on crystalline pillar cores introduced by local electrochemical reactions. In this paper, we report the distinct optoelectronic characteristics of the porous Si/SiOx shell correlated to their chemical compositions. Local photoluminescent (PL) images obtained with an immersion oil objective lens in confocal microscopy show a red emission peak (≈ 650 nm) along the perimeter of the pillars that is threefold stronger compared to their center. On the basis of our analysis, we find an unexpected PL increase (≈ 540 nm) at the oil/shell interface. We suggest that both PL enhancements are mainly attributed to the porous structures, a similar behavior observed in previous MACE studies. Surface potential maps simultaneously recorded with topography reveal a significantly high surface potential on the sidewalls of MACE-synthesized pillars (+ 0.5 V), which is restored to the level of planar Si control (− 0.5 V) after removing SiOx in hydrofluoric acid. These distinct optoelectronic characteristics of the Si/SiOx shell can be beneficial for various sensor architectures.

Low cost flexible pressure sensor using laser scribed GO/RGO periodic structure for electronic skin applications

2020 ◽  
Vol 140 ◽  
pp. 106470
Author(s):  
Zahra Hosseindokht ◽  
Raheleh Mohammadpour ◽  
Elham Asadian ◽  
Mohsen Paryavi ◽  
Hashem Rafii-Tabar ◽  
...  
Keyword(s):  
Periodic Structure ◽  
Pressure Sensor ◽  
Low Cost ◽  
Electronic Skin ◽  
Flexible Pressure Sensor

Large-Area High-Performance Flexible Pressure Sensor with Carbon Nanotube Active Matrix for Electronic Skin

Nano Letters ◽  
2018 ◽  
Vol 18 (3) ◽  
pp. 2054-2059 ◽  
Author(s):  
Luca Nela ◽  
Jianshi Tang ◽  
Qing Cao ◽  
George Tulevski ◽  
Shu-Jen Han
Keyword(s):  
Carbon Nanotube ◽  
Pressure Sensor ◽  
High Performance ◽  
Large Area ◽  
Active Matrix ◽  
Electronic Skin ◽  
Flexible Pressure Sensor

An ultrasensitive flexible pressure sensor for multimodal wearable electronic skins based on large-scale polystyrene ball@reduced graphene-oxide core–shell nanoparticles

2018 ◽  
Vol 6 (20) ◽  
pp. 5514-5520 ◽  
Author(s):  
Yuanfei Ai ◽  
Ting Heng Hsu ◽  
Ding Chou Wu ◽  
Ling Lee ◽  
Jyun-Hong Chen ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Performance ◽  
Large Scale ◽  
Shell Nanoparticles ◽  
Flexible Film ◽  
Reduced Graphene ◽  
Wearable Electronic ◽  
Flexible Pressure Sensor ◽  
Core Shell Nanoparticles ◽  
Type Pressure

In this study, we report the fabrication of a flexible film shaped resistive-type pressure sensor with high performance and versatile applications.

Metal-Assisted Plasma Etching of Silicon: A Liquid-Free Alternative to MACE

2018 ◽  
Author(s):  
Julia Sun ◽  
Benjamin Almquist
Keyword(s):  
Liquid Phase ◽  
Plasma Etching ◽  
Chemical Etching ◽  
Gold Films ◽  
Metallic Films ◽  
Au Catalyst ◽  
Feed Concentration ◽  
Catalytic Activities ◽  
Metal Assisted Chemical Etching ◽  
Complex Nanostructures

For decades, fabrication of semiconductor devices has utilized well-established etching techniques to create complex nanostructures in silicon. Of these, two of the most common are reactive ion etching in the gaseous phase and metal-assisted chemical etching (MACE) in the liquid phase. Though these two methods are highly established and characterized, there is a surprising scarcity of reports exploring the ability of metallic films to catalytically enhance the etching of silicon in dry plasmas via a MACE-like mechanism. Here, we discuss a <u>m</u>etal-<u>a</u>ssisted <u>p</u>lasma <u>e</u>tch (MAPE) performed using patterned gold films to catalyze the etching of silicon in an SF<sub>6</sub>/O<sub>2</sub> mixed plasma, selectively increasing the rate of etching by over 1000%. The degree of enhancement as a function of Au catalyst configuration and relative oxygen feed concentration is characterized, along with the catalytic activities of other common MACE metals including Ag, Pt, and Cu. Finally, methods of controlling the etch process are briefly explored to demonstrate the potential for use as a liquid-free fabrication strategy.

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