Low Cost, High Density Interposers in Aluminum Oxide Films

2016 ◽  
Author(s):  
Hsiang-Yu Chan ◽  
Chisa Fukuda ◽  
Dogukan Yildirim ◽  
G. P. Li ◽  
Mark Bachman
Keyword(s):  
Aluminum Oxide ◽  
Low Cost ◽  
Oxide Films ◽  
High Density

Chemical Vapor Deposition and Properties of Amorphous Aluminum Oxide Films

1996 ◽  
Vol 446 ◽  
Author(s):  
Roy G. Gordon ◽  
Keith Kramer ◽  
Xinye Liu
Keyword(s):  
Aluminum Oxide ◽  
Low Cost ◽  
Oxide Films ◽  
Gaseous Mixture ◽  
Chemical Vapor ◽  
Hard Coatings ◽  
Flat Panel Displays ◽  
Flat Panel ◽  
High Electrical Resistivity ◽  
Low Viscosity

AbstractFilms of amorphous aluminum oxide were deposited from vaporized alkylaluminum alkoxide compounds and oxygen. For example, a gaseous mixture of triethyldialuminum tri-sec-butoxide vapor and dry air deposits amorphous aluminum oxide films on substrates heated to temperatures around 400 °C. Transparent, smooth, adherent films of aluminum oxide were formed on silicon, glass and metal substrates. The new precursors display a number of advantages over previously used sources for aluminum oxide. They are non-pyrophoric, low-viscosity, low-cost liquids. High deposition rates, over 0.2 μm/min, were observed. The coatings have high purity, high electrical resistivity and high transparency to light. They are excellent barriers to diffusion of water and of ions, such as sodium. These films are useful in optical coatings, as wear-resistant hard coatings, and as diffusion barriers that protect flat panel displays, computer microcircuits, solar cells and metals from corrosion and degradation by impurities.

Synthesis and properties of iridescent Zn-containing anodic aluminum oxide films

2015 ◽  
Vol 586 ◽  
pp. 8-12 ◽  
Author(s):  
Xiaoxuan Jia ◽  
Huiyuan Sun ◽  
Lihu Liu ◽  
Xue Hou ◽  
Huiyuan Liu
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Oxide Films ◽  
Anodic Aluminum

Characterization of amorphous aluminum oxide films prepared by the pyrosol process

2000 ◽  
Vol 368 (1) ◽  
pp. 74-79 ◽  
Author(s):  
A. Ortiz ◽  
J.C. Alonso ◽  
V. Pankov ◽  
A. Huanosta ◽  
E. Andrade
Keyword(s):  
Aluminum Oxide ◽  
Oxide Films

Synthesis and properties of iridescent Co-containing anodic aluminum oxide films

2014 ◽  
Vol 111 ◽  
pp. 185-189 ◽  
Author(s):  
Qin Xu ◽  
Wen-Jiang Ye ◽  
Shun-Zhen Feng ◽  
Hui-Yuan Sun
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Oxide Films ◽  
Anodic Aluminum

Understanding and Optimizing Hybrid SSD with High-Density and Low-Cost Flash Memory

2021 ◽  
Author(s):  
Liang Shi ◽  
Longfei Luo ◽  
Yina Lv ◽  
Shicheng Li ◽  
Changlong Li ◽  
...  
Keyword(s):  
Flash Memory ◽  
Low Cost ◽  
High Density

Production of High-Density Bitstone Powder for Sintering Aluminum Oxide Based Ceramic

2018 ◽  
Vol 75 (5-6) ◽  
pp. 222-225
Author(s):  
A. V. Smirnov ◽  
V. P. Tarasovskii ◽  
S. G. Ponomarev ◽  
V. V. Rybal’chenko ◽  
A. A. Vasin
Keyword(s):  
Aluminum Oxide ◽  
High Density
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