A reliable thermosonic wire bond of GaAs-devices analysed by infrared-microscopy

Author(s):  
S. Weiss ◽  
E. Zakel ◽  
H. Reichl
Author(s):  
Tien-Yu Tom Lee ◽  
Victor A. Chiriac

Thermal simulation and infrared characterization are conducted to evaluate and compare the thermal performance of three interconnect options: wire bond, direct die attach, and flip chip interconnect. The test vehicle is a dual band RF PA module with low and high-band GaAs devices. As only one band is operated at a time, the focus is on the low-band GSM GaAs die. For direct die attach interconnect, the wire bond device is reused with all RF in/outs being connected from the backside of the GaAs device through individual vias in the device. The effects of through via design, solder attach material and thickness, and the thermal via layout in the substrate are evaluated. For flip chip interconnect, the original wire bond device was redesigned to accommodate metallic bumps for RF in/out, control and grounding. The ground bumps placed directly above the heat source area provide the main heat transfer path to the substrate. The size of the ground bumps, its material and the thermal vias layout in the substrate are investigated. Infrared thermal characterizations were conducted on both wire bond and direct die attach options to validate the simulations, with good agreement.


Author(s):  
Richard G. Sartore

In the evaluation of GaAs devices from the MMIC (Monolithic Microwave Integrated Circuits) program for Army applications, there was a requirement to obtain accurate linewidth measurements on the nominal 0.5 micrometer gate lengths used to fabricate these devices. Preliminary measurements indicated a significant variation (typically 10 % to 30% but could be more) in the critical dimensional measurements of the gate length, gate to source distance and gate to drain distance. Passivation introduced a margin of error, which was removed by plasma etching. Additionally, the high aspect ratio (4-5) of the thick gold (Au) conductors also introduced measurement difficulties. The final measurements were performed after the thick gold conductor was removed and only the barrier metal remained, which was approximately 250 nanometer thick platinum on GaAs substrate. The thickness was measured using the penetration voltage method. Linescan of the secondary electron signal as it scans across the gate is shown in Figure 1.


2005 ◽  
Author(s):  
A. Baca ◽  
C. Ashby
Keyword(s):  

2020 ◽  
Author(s):  
Haomin Wang ◽  
Joseph M. González-Fialkowski ◽  
Wenqian Li ◽  
Yan Yu ◽  
Xiaoji Xu

Atomic force microscopy-infrared microscopy (AFM-IR) provides a route to bypass Abbe’s diffraction limit through photothermal detections of infrared absorption. With the combination of total internal reflection, AFM-IR can operate in the aqueous phase. However, AFM-IR in contact mode suffers from surface damage from the lateral shear force between the tip and sample, and can only achieve 20~25-nm spatial resolution. Here, we develop the liquid-phase peak force infrared (LiPFIR) microscopy that avoids the detrimental shear force and delivers an 8-nm spatial resolution. The non-destructiveness of the LiPFIR microscopy enables <i>in situ</i> chemical measurement of heterogeneous materials and investigations on a range of chemical and physical transformations, including polymer surface reorganization, hydrogen-deuterium isotope exchange, and ethanol-induced denaturation of proteins. We also perform LiPFIR imaging of the budding site of yeast cell wall in the fluid as a demonstration of biological applications. LiPFIR unleashes the potential of in liquid AFM-IR for chemical nanoscopy.


Author(s):  
Steve K. Hsiung ◽  
Kevan V. Tan ◽  
Andrew J. Komrowski ◽  
Daniel J. D. Sullivan ◽  
Jan Gaudestad

Abstract Scanning SQUID (Superconducting Quantum Interference Device) Microscopy, known as SSM, is a non-destructive technique that detects magnetic fields in Integrated Circuits (IC). The magnetic field, when converted to current density via Fast Fourier Transform (FFT), is particularly useful to detect shorts and high resistance (HR) defects. A short between two wires or layers will cause the current to diverge from the path the designer intended. An analyst can see where the current is not matching the design, thereby easily localizing the fault. Many defects occur between or under metal layers that make it impossible using visible light or infrared emission detecting equipment to locate the defect. SSM is the only tool that can detect signals from defects under metal layers, since magnetic fields are not affected by them. New analysis software makes it possible for the analyst to overlay design layouts, such as CAD Knights, directly onto the current paths found by the SSM. In this paper, we present four case studies where SSM successfully localized short faults in advanced wire-bond and flip-chip packages after other fault analysis methods failed to locate the defects.


MethodsX ◽  
2021 ◽  
pp. 101320
Author(s):  
Goutham Issac Ashok Kumar ◽  
John Alptekin ◽  
Joshua Caperton ◽  
Ashish Salunke ◽  
Oliver Chyan

IEEE Access ◽  
2019 ◽  
Vol 7 ◽  
pp. 75648-75657 ◽  
Author(s):  
Guillermo Machuca ◽  
Sergio N. Torres ◽  
Bradley M. Ratliff ◽  
Pablo A. Gutierrez ◽  
Anselmo Jara ◽  
...  

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