Aspect ratio dependent etching in advanced deep reactive ion etching of quartz

2017 ◽  
Author(s):  
P. Chapellier ◽  
P. Lavenus ◽  
B. Bourgeteau-Verlhac ◽  
C. Gageant ◽  
O. Le Traon ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Ratio Dependent

Deep reactive ion etching of sub-micrometer trenches with ultra high aspect ratio

2014 ◽  
Vol 113 ◽  
pp. 35-39 ◽  
Author(s):  
Jayalakshmi Parasuraman ◽  
Anand Summanwar ◽  
Frédéric Marty ◽  
Philippe Basset ◽  
Dan E. Angelescu ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching

Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques

2010 ◽  
Vol 10 (1) ◽  
pp. 497-501 ◽  
Author(s):  
David Caballero ◽  
Guillermo Villanueva ◽  
Jose Antonio Plaza ◽  
Christopher A. Mills ◽  
Josep Samitier ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Afm Tips

Antistick Postpassivation of High-Aspect Ratio Silicon Molds Fabricated by Deep-Reactive Ion Etching

2006 ◽  
Vol 15 (1) ◽  
pp. 84-93 ◽  
Author(s):  
J.X. Gao ◽  
L.P. Yeo ◽  
M.B. Chan-Park ◽  
J.M. Miao ◽  
Y.H. Yan ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching

SiC Wafer Bonding and Deep Reactive Ion Etching Towards High-Aspect Ratio SiC MEMS Fabrication

2018 ◽  
Vol 86 (5) ◽  
pp. 105-110 ◽  
Author(s):  
Lunet E Luna ◽  
Karl D. Hobart ◽  
Marko J Tadjer ◽  
Rachael L. Myers-Ward ◽  
Travis J. Anderson ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Wafer Bonding ◽  
High Aspect Ratio ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
Mems Fabrication ◽  
Sic Wafer
Sign in / Sign up

Export Citation Format

Share Document