Material Fatigue and Reliability of MEMS Accelerometers

Author(s):  
Xingguo Xiong ◽  
Yu-Liang Wu ◽  
Wen-Ben Jone
2020 ◽  
Vol 14 (3) ◽  
pp. 327-354
Author(s):  
Mohammad Omidalizarandi ◽  
Ralf Herrmann ◽  
Boris Kargoll ◽  
Steffen Marx ◽  
Jens-André Paffenholz ◽  
...  

AbstractToday, short- and long-term structural health monitoring (SHM) of bridge infrastructures and their safe, reliable and cost-effective maintenance has received considerable attention. From a surveying or civil engineer’s point of view, vibration-based SHM can be conducted by inspecting the changes in the global dynamic behaviour of a structure, such as natural frequencies (i. e. eigenfrequencies), mode shapes (i. e. eigenforms) and modal damping, which are known as modal parameters. This research work aims to propose a robust and automatic vibration analysis procedure that is so-called robust time domain modal parameter identification (RT-MPI) technique. It is novel in the sense of automatic and reliable identification of initial eigenfrequencies even closely spaced ones as well as robustly and accurately estimating the modal parameters of a bridge structure using low numbers of cost-effective micro-electro-mechanical systems (MEMS) accelerometers. To estimate amplitude, frequency, phase shift and damping ratio coefficients, an observation model consisting of: (1) a damped harmonic oscillation model, (2) an autoregressive model of coloured measurement noise and (3) a stochastic model in the form of the heavy-tailed family of scaled t-distributions is employed and jointly adjusted by means of a generalised expectation maximisation algorithm. Multiple MEMS as part of a geo-sensor network were mounted at different positions of a bridge structure which is precalculated by means of a finite element model (FEM) analysis. At the end, the estimated eigenfrequencies and eigenforms are compared and validated by the estimated parameters obtained from acceleration measurements of high-end accelerometers of type PCB ICP quartz, velocity measurements from a geophone and the FEM analysis. Additionally, the estimated eigenfrequencies and modal damping are compared with a well-known covariance driven stochastic subspace identification approach, which reveals the superiority of our proposed approach. We performed an experiment in two case studies with simulated data and real applications of a footbridge structure and a synthetic bridge. The results show that MEMS accelerometers are suitable for detecting all occurring eigenfrequencies depending on a sampling frequency specified. Moreover, the vibration analysis procedure demonstrates that amplitudes can be estimated in submillimetre range accuracy, frequencies with an accuracy better than 0.1 Hz and damping ratio coefficients with an accuracy better than 0.1 and 0.2 % for modal and system damping, respectively.


Author(s):  
Hidehiko SEKIYA ◽  
Takeshi KINOMOTO ◽  
Masayuki Tai ◽  
Yusuke Koto ◽  
Osamu Maruyama ◽  
...  

Author(s):  
Yanping Bai ◽  
Ping An ◽  
Yilong Hao

Fabrication of a MEMS system involves design, testing, packaging and reliability related issues. However, reliability issues that are discovered at a late phase may cause major delays in the product development going together with high costs. In this paper we study the failure modes and Mechanisms of MEMS accelerometers products and present the classification modeling of failure modes based on neural networks. In ours MEMS accelerometers, there are six failure mechanisms that have been found to be the primary sources of failure nodes. We introduce nonlinear BP network with a hidden layer and linear perception to classify for MEMS accelerometers products. Classification results show that nonlinear BP network seem to be most appropriate to approach the problem of failure modes classification than linear perception. BP neural network is capable of learning the intrinsic relations of the patterns with which they were trained. For all experiments results, the training success of rate is 100% for both methods. BP networks obtained a high forecast success of rate of over 99.5%. The linear perception model obtained a success of rate of over 95.5%. We also analyze the technology stability of MEMS products.


2019 ◽  
Vol 799 ◽  
pp. 71-76
Author(s):  
Oskars Linins ◽  
Ernests Jansons ◽  
Armands Leitans ◽  
Irina Boiko ◽  
Janis Lungevics

The paper is aimed to the methodology for estimation of service life of mechanical engineering components in the case of elastic-plastic contact of surfaces. Well-known calculation methods depending on physics, theory of probability, the analysis of friction pair’ shape and fit include a number of parameters that are difficult or even impossible to be technologically controlled in the manufacturing of mechanical engineering components. The new approach for wear rate estimation using surface texture parameters as well as physical-mechanical properties and geometric parameters of components is proposed. The theoretical part of the calculations is based on the 3D surface texture principles, the basics of material fatigue theory, the theory of elasticity and the contact mechanics of surfaces. It is possible to calculate the service time of the machine, but the process of running-in of the components is relatively short (less than 5%), therefore, the service time is mainly determined by a normal operating period, which also was used to evaluate this period. The calculated input parameters are technologically and metrologically available and new method for calculating the service time can be used in the design process of the equipment. The results of approbation of the method for estimation service time of mechanical engineering, which prove the applicability of mentioned method, are offered as well.


2018 ◽  
Vol 7 (3) ◽  
pp. 30 ◽  
Author(s):  
Chiara Bedon ◽  
Enrico Bergamo ◽  
Matteo Izzi ◽  
Salvatore Noè

In recent years, thanks to the simple and yet efficient design, Micro Electro-Mechanical Systems (MEMS) accelerometers have proven to offer a suitable solution for Structural Health Monitoring (SHM) in civil engineering applications. Such devices are typically characterised by high portability and durability, as well as limited cost, hence resulting in ideal tools for applications in buildings and infrastructure. In this paper, original self-made MEMS sensor prototypes are presented and validated on the basis of preliminary laboratory tests (shaking table experiments and noise level measurements). Based on the well promising preliminary outcomes, their possible application for the dynamic identification of existing, full-scale structural assemblies is then discussed, giving evidence of their potential via comparative calculations towards past literature results, inclusive of both on-site, Experimental Modal Analysis (EMA) and Finite Element Analytical estimations (FEA). The full-scale experimental validation of MEMS accelerometers, in particular, is performed using, as a case study, the cable-stayed bridge in Pietratagliata (Italy). Dynamic results summarised in the paper demonstrate the high capability of MEMS accelerometers, with evidence of rather stable and reliable predictions, and suggest their feasibility and potential for SHM purposes.


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