Material Fatigue and Reliability of MEMS Accelerometers
Keyword(s):
2017 ◽
Vol 73
(2)
◽
pp. I_649-I_660
2017 ◽
Vol 53
(3)
◽
pp. 294-302
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2011 ◽
Vol 1
(12)
◽
pp. 1934-1938
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Keyword(s):
2018 ◽
Vol 7
(3)
◽
pp. 30
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