Lithographically fabricated micro-optical array beam shapers for ultra-short pulse lasers

Oxides, borides and carbides of the transition elements are materials of great interest from a technologic point of view. Many of these materials are used in the form of thin films, so several techniques are commonly used to deposit them. Among these techniques, Pulsed Laser Deposition (PLD) performed using ultra-short pulse lasers, mainly fs lasers, presents unique characteristics in respect to PLD performed using conventional short pulse lasers. Indeed, the films deposited using fs PLD are often nanostructured, and this technique often allows the target stoichiometry to be transferred to the films. In this work, we will review the use of ultra-short PLD in the production of films obtained from transition metal oxides, borides and carbides, evidencing the advantages offered by this technique, together with the problems arising with some of the studied systems. We conclude that even if ultra-short PLD is surely one of the most important and useful deposition techniques, it also presents limits that cannot be ignored.

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Efficiency aspects in processing of metals with high-repetition-rate ultra-short-pulse lasers

10.2351/1.5061377 ◽

2008 ◽

Cited By ~ 6

Author(s):

Gediminas Raciukaitis ◽

Marijus Brikas ◽

Mindaugas Gedvilas

Keyword(s):

Repetition Rate ◽

Short Pulse ◽

High Repetition Rate ◽

High Repetition ◽

Short Pulse Lasers ◽

Ultra Short Pulse

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Mikrostrukturierung mit innovativen Laserverfahren/Microstructuring Using Innovative Laser Processes

wt Werkstattstechnik online ◽

10.37544/1436-4980-2020-06-90 ◽

2020 ◽

Vol 110 (06) ◽

pp. 450-455

Author(s):

Johannes-Thomas Finger ◽

Andreas Brenner ◽

Ludwig Pongratz ◽

Arnold Gillner

Keyword(s):

Pulse Sequence ◽

Short Pulse ◽

Production Engineering ◽

Large Area ◽

Feature Size ◽

Laser Polishing ◽

Additional Process ◽

Short Pulse Lasers ◽

Ultra Short Pulse ◽

Temporal Pulse

Die Herstellung funktionaler Oberflächen mit Strukturmerkmalen im Mikrometerbereich stellt für die Fertigungstechnik eine besondere Herausforderung dar. Ultrakurzpulslaser mit Pulsdauern im Femto- und Picosekundenbereich bieten hier Lösungen zur großflächigen Strukturierung mit Genauigkeiten im Nanometerbereich. Durch Kontrolle der zeitlichen Pulsfolge lassen sich die Produktivität des Verfahrens signifikant steigern und zusätzliche Prozessschritte, wie das Laserpolieren, integrieren.   The manufacturing of functional surfaces with feature size in the micrometre range is a distinct challenge in the field of production engineering. Ultra-short pulse lasers with pulse durations in the femto- and picosecond range offer solutions for large-area structuring with accuracies in the nanometer range. By controlling the temporal pulse sequence, the productivity of the process can be significantly increased and additional process steps such as laser polishing can be integrated.

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