The Analysis and Optimum Design on Compliant Micro-Gripper with Micro-Force Sensor

2009 ◽  
Author(s):  
Yong Xu ◽  
Jianying Zhu
Keyword(s):  
Optimum Design ◽  
Force Sensor ◽  
Micro Gripper ◽  
Micro Force Sensor

Research on PVDF Micro-Force Sensor

2014 ◽  
Vol 599-601 ◽  
pp. 1135-1138
Author(s):  
Chao Zhe Ma ◽  
Jin Song Du ◽  
Yi Yang Liu
Keyword(s):  
Power Dissipation ◽  
Polyvinylidene Fluoride ◽  
High Sensitivity ◽  
Force Sensor ◽  
Calibration Method ◽  
Pvdf Film ◽  
Force Sensors ◽  
Low Power Dissipation ◽  
Micro Force Sensor ◽  
Processing Circuit

At present, sub-micro-Newton (sub-μN) micro-force in micro-assembly and micro-manipulation is not able to be measured reliably. The piezoelectric micro-force sensors offer a lot of advantages for MEMS applications such as low power dissipation, high sensitivity, and easily integrated with piezoelectric micro-actuators. In spite of many advantages above, the research efforts are relatively limited compared to piezoresistive micro-force sensors. In this paper, Sensitive component is polyvinylidene fluoride (PVDF) and the research object is micro-force sensor based on PVDF film. Moreover, the model of micro-force and sensor’s output voltage is built up, signal processing circuit is designed, and a novel calibration method of micro-force sensor is designed to reliably measure force in the range of sub-μN. The experimental results show the PVDF sensor is designed in this paper with sub-μN resolution.

scholarly journals A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines

Micromachines ◽  
2017 ◽  
Vol 8 (10) ◽  
pp. 304
Author(s):  
Huan Liu ◽  
Zhongliang Yu ◽  
Yan Liu ◽  
Xudong Fang
Keyword(s):  
Membrane Structure ◽  
Force Sensor ◽  
Friction Torque ◽  
Micro Force Sensor

scholarly journals Micro-force measurement with pre-curvature long-period fiber grating-based sensor

2020 ◽  
Vol 238 ◽  
pp. 12009
Author(s):  
Walter S. J. Ferreira ◽  
Paulo S. S. dos Santos ◽  
Paulo Caldas ◽  
Pedro A. S. Jorge ◽  
João M. S. Sakamoto
Keyword(s):  
Optical Fiber ◽  
Spectral Resolution ◽  
Force Measurement ◽  
Force Sensor ◽  
Fiber Grating ◽  
Long Period Fiber Grating ◽  
Long Period ◽  
Force Sensitivity ◽  
Period Fiber Grating ◽  
Micro Force Sensor

In this work, a long-period fiber grating (LPG) based sensor was evaluated as a sensing device for micro-force measurement, in the order of micro Newtons. It was used an LPG fabricated by arc-inducted technique in a SMF-28 standard optical fiber. The optical fiber was fixed between two clamps with a separation of 150 mm with the middle of the LPG located at the center. Characterizations were performed in terms of temperature, curvature and strain. The grating was then used as a micro-force sensor by means of both curvature and strain, induced by a hung mass in a stretched fiber. Furthermore, the evaluation of a precurvature LPG was performed to assess if an increase of sensitivity is achieved. Micro-force sensitivity achieved with the stretched LPG was 1.41 nm/mN and it was demonstrated that its sensitivity can be enhanced to 5.14 nm/mN with a pre-curvature of 2.2 m–1 applied to the LPG, achieving a spectral resolution of at least 15.6 μN.

Development of a Novel Micro-Gripper Integrating Tri-Axial Force Sensor

2007 ◽  
Author(s):  
Jiachou Wang ◽  
Weibin Rong ◽  
Lining Sun ◽  
Hui Xie ◽  
Wei Chen
Keyword(s):  
Axial Force ◽  
Crystalline Silicon ◽  
Force Sensor ◽  
Calibration Method ◽  
Deep Reactive Ion Etching ◽  
Micro Gripper ◽  
The Cross ◽  
Silicon Frame ◽  
High Level ◽  
Cross Structure

A novel micro gripper integrating tri-axial force sensor and two grades displacement amplifier is presented in this paper, which bases on the technology of Piezoresistive detection and use PZT as its micro driving component. The micro tri-axial force sensor is fabricated on a single-crystalline-silicon by the technology of MEMS and consists of a flexible cross-structure realized by deep reactive ion etching (DRIE). The arms of the cross-structure are connected to a silicon frame and to the central part of the cross-structure. After modeling the amplifier structure of micro gripper and the sensor, finite element method (FEM) is used to analyze the displacement of the micro gripper and the deformation of the cross-structure elastic cantilever. A calibration method of tri-axial sensor based on the technology of microscopic vision and the principle of bending deflection cantilever is proposed. The experimental verified that the sensor are high level of intrinsic decoupling of the signals from strain gauge, high resolutions in all three axes, high linearity and repeatability and simple produce of calculation. And also show the micro gripper is reasonable and practical. The sensor is capable of resolving forces up to 10mN with resolution of 2.4μN in x axis and y axis and up to 10mN with resolution of 4.2μN in z axis; the gripping displacement of the micro gripper is from 20μm to 300μm.

Dextrous cell diagnosis using two-fingered microhand with micro force sensor

2012 ◽  
Vol 7 (1-3) ◽  
pp. 13-20 ◽  
Author(s):  
Kenichi Ohara ◽  
Daiki Kawakami ◽  
Tomohito Takubo ◽  
Yasushi Mae ◽  
Tamio Tanikawa ◽  
...  
Keyword(s):  
Force Sensor ◽  
Micro Force Sensor

Force Controlled Manipulation of Biological Cells Using a Monolithic MEMS Based Nano-Micro Gripper

2012 ◽  
Author(s):  
Ali A. Abbasi ◽  
M. T. Ahmadian
Keyword(s):  
Liquid Medium ◽  
Force Control ◽  
Force Sensor ◽  
Rapid Response ◽  
Pid Controllers ◽  
Biological Cells ◽  
Matlab Software ◽  
Micro Gripper ◽  
The Future ◽  
Geometrical Dimensions

Nano-micro grippers are able to pick-transport-place the micro or nanometer–sized materials, such as manipulation of biological cells or DNA molecules in a liquid medium. This paper proposes a novel monolithic nano-micro gripper structure with two axis piezoresistive force sensor which its resolution is under nanoNewton. The results of the study have been obtained by the simulation of the proposed gripper structure in Matlab software. Motion of the gripper arm is produced by a voice coil actuator. The behavior of the cell has been derived using the assumptions in the literatures. Moreover, two simple PID controllers, one for control of the gripper motion and another for control of the force during manipulation of a biologic cell, have been implemented. Although the proposed gripper has not been fabricated, since the geometrical dimensions of the proposed gripper is the same as previously developed electrothermally actuated micro-nano gripper, the results of force control have been also compared with it. The simulated results with the very simple PID force controller which has a more rapid response than previously developed electrothermally actuated micro-nano gripper show that the designed gripper has the potential to be considered and fabricated for manipulation of biological cells in the future.

Automated cell stiffness measurement with two-fingered microhand using micro force sensor

2014 ◽  
Author(s):  
Hiroyuki Yabugaki ◽  
Kenichi Ohara ◽  
Masaru Kojima ◽  
Mitsuhiro Horade ◽  
Kazuto Kamiyama ◽  
...  
Keyword(s):  
Force Sensor ◽  
Cell Stiffness ◽  
Stiffness Measurement ◽  
Micro Force Sensor
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