Feedback control of thin film growth in an HPCVD reactor via reduced order models

2003 ◽  
Author(s):  
H.T. Banks ◽  
S.C. Beeler ◽  
G.M. Kepler ◽  
H.T. Tran
Keyword(s):  
Thin Film ◽  
Feedback Control ◽  
Film Growth ◽  
Thin Film Growth ◽  
Reduced Order Models ◽  
Reduced Order

scholarly journals Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor

2002 ◽  
Vol 62 (4) ◽  
pp. 1251-1280 ◽  
Author(s):  
G. M. Kepler ◽  
H. T. Banks ◽  
H. T. Tran ◽  
S. C. Beeler
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Reduced Order Modeling ◽  
Thin Film Growth ◽  
Modeling And Control ◽  
Reduced Order ◽  
And Control

An SDRE-Based Approach for HIV Feedback Control and Control of Thin Film Growth in a CVD Reactor

2011 ◽  
Vol 44 (1) ◽  
pp. 9601-9606 ◽  
Author(s):  
H.T. Banks ◽  
S.C. Beeler ◽  
Hee-Dae Kwon ◽  
B.M. Lewis ◽  
J.A. Toivanen ◽  
...  
Keyword(s):  
Thin Film ◽  
Feedback Control ◽  
Film Growth ◽  
Thin Film Growth ◽  
And Control

Feedback control of growth rate and surface roughness in thin film growth

AIChE Journal ◽  
2003 ◽  
Vol 49 (8) ◽  
pp. 2099-2113 ◽  
Author(s):  
Yiming Lou ◽  
Panagiotis D. Christofides
Keyword(s):  
Thin Film ◽  
Growth Rate ◽  
Surface Roughness ◽  
Feedback Control ◽  
Film Growth ◽  
Thin Film Growth
Sign in / Sign up

Export Citation Format

Share Document