A Density Mapping Algorithm for Supporting Cyber Foraging Service Networks

Author(s):  
Manjinder Nir ◽  
Ashraf Matrawy
Author(s):  
Jing-jiang Yu ◽  
T. Yamaoka ◽  
T. Aiso ◽  
K. Watanabe ◽  
Y. Shikakura ◽  
...  

Abstract Scanning nonlinear dielectric microscopy is continuously developed as an AFM-derived method for 2D dopant profiling of semiconductor devices. In this paper, the authors apply 2D carrier density mapping to Si and SiC and succeed a high resolution observation of the SiC planar power MOSFET. Furthermore, they develop software that combines dC/dV and dC/dz images and expresses both density and polarity in a single distribution image. The discussion provides the details of AFM experiments that were conducted using a Hitachi environmental control AFM5300E system. The results indicated that the carrier density decreases in the boundary region between n plus source and p body. The authors conclude that although the resolutions of dC/dV and dC/dz are estimated to be 20 nm or less and 30 nm or less, respectively, there is a possibility that the resolution can be further improved by using a sharpened probe.


2013 ◽  
Vol 33 (1) ◽  
pp. 76-79
Author(s):  
Jiamin LIU ◽  
Huiyan WANG ◽  
Xiaoli ZHOU ◽  
Fulin LUO

2011 ◽  
Vol 33 (10) ◽  
pp. 2347-2352
Author(s):  
Bo Lü ◽  
Fan Yang ◽  
Zhen-kai Wang ◽  
Jian-ya Chen ◽  
Yun-jie Liu

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