Study of sol-gel type ceria particle for CMP process in leading-edge CMOS device: YE: Yield enhancement/learning
2013 ◽
Vol 2013
(CICMT)
◽
pp. 000059-000068
1986 ◽
Vol 44
◽
pp. 448-449
1994 ◽
Vol 52
◽
pp. 1028-1029
1994 ◽
Vol 52
◽
pp. 646-647
1994 ◽
Vol 52
◽
pp. 886-887