Advanced metrology tool for Si/sub 1-x/Ge/sub x/ characterization: Infrared Spectroscopic Ellipsometer (IRSE)
New design of the variable angle infrared spectroscopic ellipsometer using double Fourier transforms
2000 ◽
Vol 71
(7)
◽
pp. 2677-2683
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Keyword(s):
2013 ◽
Vol 84
(2)
◽
pp. 023901
◽
Keyword(s):
Keyword(s):
1985 ◽
Vol 50
(10)
◽
pp. 2139-2145
1985 ◽
Vol 50
(12)
◽
pp. 2715-2721