New infrared spectroscopic ellipsometer for low-k dielectric characterization
Keyword(s):
New design of the variable angle infrared spectroscopic ellipsometer using double Fourier transforms
2000 ◽
Vol 71
(7)
◽
pp. 2677-2683
◽
Keyword(s):
2003 ◽
Vol 70
(2-4)
◽
pp. 320-329
◽
2013 ◽
Vol 84
(2)
◽
pp. 023901
◽
Keyword(s):
1998 ◽
Vol 08
(PR9)
◽
pp. Pr9-113-Pr9-116
◽