Real time evaluation of an air leak into a dry etching equipment by means of optical emission spectroscopy: evaluation and results in high volume production regime

2003 ◽  
Author(s):  
F. Ciovacco ◽  
S. Alba ◽  
G. Fazio ◽  
F. Somboli
Keyword(s):  
Real Time ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
High Volume ◽  
Air Leak ◽  
High Volume Production ◽  
Volume Production ◽  
Production Regime ◽  
Time Evaluation

scholarly journals Machine Learning Prediction of Electron Density and Temperature from Optical Emission Spectroscopy in Nitrogen Plasma

Coatings ◽  
2021 ◽  
Vol 11 (10) ◽  
pp. 1221
Author(s):  
Jun-Hyoung Park ◽  
Ji-Ho Cho ◽  
Jung-Sik Yoon ◽  
Jung-Ho Song
Keyword(s):  
Machine Learning ◽  
Electron Temperature ◽  
Real Time ◽  
Electron Density ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Parameters ◽  
Plasma Nitridation

We present a non-invasive approach for monitoring plasma parameters such as the electron temperature and density inside a radio-frequency (RF) plasma nitridation device using optical emission spectroscopy (OES) in conjunction with multivariate data analysis. Instead of relying on a theoretical model of the plasma emission to extract plasma parameters from the OES, an empirical correlation was established on the basis of simultaneous OES and other diagnostics. Additionally, we developed a machine learning (ML)-based virtual metrology model for real-time Te and ne monitoring in plasma nitridation processes using an in situ OES sensor. The results showed that the prediction accuracy of electron density was 97% and that of electron temperature was 90%. This method is especially useful in plasma processing because it provides in-situ and real-time analysis without disturbing the plasma or interfering with the process.

Noninvasive, real-time measurements of plasma parameters via optical emission spectroscopy

2013 ◽  
Vol 31 (2) ◽  
pp. 021303 ◽  
Author(s):  
Shicong Wang ◽  
Amy E. Wendt ◽  
John B. Boffard ◽  
Chun C. Lin ◽  
Svetlana Radovanov ◽  
...  
Keyword(s):  
Real Time ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Parameters
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