How to simultaneously reduce α and β error with SPC? A multivariate process control approach

2002 ◽  
Author(s):  
R. Nasongkhla ◽  
J.G. Shanthikumar ◽  
R.K. Nurani ◽  
M. McIntyre
Keyword(s):  
Process Control ◽  
Multivariate Process ◽  
Control Approach ◽  
Multivariate Process Control

scholarly journals Multivariate Process Control Using the FNAD Methodology

2003 ◽  
Vol 36 (5) ◽  
pp. 777-782
Author(s):  
Teodor Tiplica ◽  
Abdessamad Kobi ◽  
Alain Barreau
Keyword(s):  
Process Control ◽  
Multivariate Process ◽  
Multivariate Process Control

Predictive Neuro-fuzzy Controller for Multivariate Process Control

1996 ◽  
Vol 39 (4) ◽  
pp. 1535-1541 ◽  
Author(s):  
Y. S. Choi ◽  
A. D. Whittaker ◽  
D. C. Bullock
Keyword(s):  
Process Control ◽  
Fuzzy Controller ◽  
Multivariate Process ◽  
Multivariate Process Control ◽  
Neuro Fuzzy

Addressing Dynamic Process Changes in High Volume Plasma Etch Manufacturing by Using Multivariate Process Control

2010 ◽  
Vol 23 (2) ◽  
pp. 185-193 ◽  
Author(s):  
Blake R. Parkinson ◽  
Hyung Lee ◽  
Merritt Funk ◽  
Daniel Prager ◽  
Asao Yamashita ◽  
...  
Keyword(s):  
Process Control ◽  
Dynamic Process ◽  
High Volume ◽  
Plasma Etch ◽  
Multivariate Process ◽  
Multivariate Process Control
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