Wafer fab construction cost analysis and cost reduction strategies: applications of SEMATECH's future factory analysis methodology
Keyword(s):
2010 ◽
Vol 23
(5)
◽
pp. 470-488
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1997 ◽
Vol 13
(4)
◽
pp. 44-47
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2019 ◽
Vol 6
◽
pp. 54-62
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Keyword(s):
1989 ◽
Vol 27
(7)
◽
pp. 1065-1080
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