Propagation and scattering in a microwave plasma chamber

2015 ◽  
Author(s):  
Eric Peterson ◽  
Vijay Katta ◽  
Jayanti Venkataraman ◽  
Merritt Funk ◽  
Megan Doppel ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Plasma Chamber

scholarly journals Modelling and Study of a Microwave Plasma Source for High-rate Etching

2019 ◽  
Author(s):  
Steffen Pauly ◽  
Andreas Schulz ◽  
Matthias Walker ◽  
Günter Tovar ◽  
Monika Balk ◽  
...  
Keyword(s):  
Electric Field ◽  
Field Distribution ◽  
Electric Field Distribution ◽  
Microwave Plasma ◽  
Substrate Surface ◽  
Plasma Source ◽  
Production Costs ◽  
Optical Measurements ◽  
Real Field ◽  
Plasma Chamber

The aim of the study is to optimize an existing microwave powered remote plasma source (RPS) with respect to the etching rate and gas temperature and to simplify the setup to save production costs. The RPS, which is shown in figure 1, is a low-pressure plasma source where the plasma is generated and exists mainly in the chamber of the source. Only radicals migrate out of the RPS. This is one important feature, that the plasma source is used for etching processes when ion bombardment and high thermal strain of the substrate must be prevented. The etching process is a chemical process, where the radicals react with the substrate surface atoms forming gaseous molecules. The benefit is a damage-free, dry and clean substrate surface. To achieve these goals, a FEM-based model of the RPS has been developed to investigate the microwave distribution and the microwave coupling into the plasma chamber, as well as the plasma itself. In this paper different examples of FEM based microwave simulations by different conditions and their experimental validations will be presented. To compare the calculated electric field distribution in the RPS with the real field distribution, PMMA-substrates were placed inside the plasma chamber of the source. They are heated up by the electric field and evaluated with an infrared camera and liquid crystal sheets. Both the measured and the calculated field distribution show a very good conformity. When the electric field is high enough in the plasma chamber the plasma ignites, the electron density and thus the permittivity and the conductivity increase, which changes again the electric field distribution. For this purpose, the FEM-model has been extended by the Drude model1. The model considers the equation of motion with a damping term for the electrons, leading to an expression for the conductivity. Results for various electron densities as well as their corresponding electric field distributions are presented and compared with optical measurements.     Fig. 1. The figure shows the scheme of the RPS with its main components and functions.

Ground State and Excited State H-Atom Temperatures in a Microwave Plasma Diamond Deposition Reactor

1996 ◽  
Vol 6 (9) ◽  
pp. 1167-1180 ◽  
Author(s):  
A. Gicquel ◽  
M. Chenevier ◽  
Y. Breton ◽  
M. Petiau ◽  
J. P. Booth ◽  
...  
Keyword(s):  
Excited State ◽  
Ground State ◽  
Microwave Plasma ◽  
Diamond Deposition

Fabrication and Evaluation of SiO2 Thin Films on Si Substrates by Microwave Plasma in Various Conditions

2020 ◽  
Vol 140 (4) ◽  
pp. 186-192
Author(s):  
Shumpei Ogawa ◽  
Tatsuya Kuroda ◽  
Yasuyuki Katou ◽  
Hironori Haga ◽  
Hiroki Ishizaki
Keyword(s):  
Thin Films ◽  
Microwave Plasma ◽  
Si Substrates

THE MODIFICATION OF PAPER INDUCED BY RADIO FREQUENCY AND MICROWAVE PLASMA TREATMENT

2007 ◽  
Vol 11 (4) ◽  
pp. 593-600
Author(s):  
V. V. Azharonok ◽  
I. I. Filatova ◽  
A. P. Dostanko ◽  
S. V. Bordusov ◽  
Yu. S. Shynkevich
Keyword(s):  
Radio Frequency ◽  
Plasma Treatment ◽  
Microwave Plasma

Microwave Plasma Technology of Pulverized Coal Combustion

2004 ◽  
Vol 61 (7-12) ◽  
pp. 650-662 ◽  
Author(s):  
Dmitry M. Vavriv ◽  
V. I. Kazantsev ◽  
P. M. Kanilo ◽  
N. I. Rasyuk ◽  
K. Schunemann ◽  
...  
Keyword(s):  
Coal Combustion ◽  
Microwave Plasma ◽  
Pulverized Coal ◽  
Pulverized Coal Combustion ◽  
Plasma Technology

Preparation of Magnesia Stabilized Zirconia Thin Films for Solid Oxide Fuel Cell by Microwave Plasma Chemical Vapor Deposition.

Shinku ◽  
1997 ◽  
Vol 40 (8) ◽  
pp. 660-663
Author(s):  
Hideo OKAYAMA ◽  
Tsukasa KUBO ◽  
Noritaka MOCHIZUKI ◽  
Akiyoshi NAGATA ◽  
Hiromu ISA
Keyword(s):  
Thin Films ◽  
Fuel Cell ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Solid Oxide ◽  
Oxide Fuel ◽  
Stabilized Zirconia ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

Method of tribodiagnostics of d-30KU engines/KP with the use of a microwave plasma complex: results of metrological examination and analysis of the accuracy

2020 ◽  
pp. 22-29
Author(s):  
A. Bogoyavlenskiy ◽  
A. Bokov
Keyword(s):  
Gas Turbine ◽  
Microwave Plasma ◽  
Technical Condition ◽  
The State ◽  
Turbine Engines ◽  
Metrological Examination ◽  
Gas Turbine Engines ◽  
High Frequency Plasma ◽  
Frequency Plasma ◽  
Primary Standards

The article contains the results of the metrological examination and research of the accuracy indicators of a method for diagnosing aircraft gas turbine engines of the D30KU/KP family using an ultra-high-frequency plasma complex. The results of metrological examination of a complete set of regulatory documents related to the diagnostic methodology, and an analysis of the state of metrological support are provided as well. During the metrological examination, the traceability of a measuring instrument (diagnostics) – an ultrahigh-frequency plasma complex – is evaluated based on the scintillation analyzer SAM-DT-01–2. To achieve that, local verification schemes from the state primary standards of the corresponding types of measurements were built. The implementation of measures to eliminate inconsistencies identified during metrological examination allows to reduce to an acceptable level the metrological risks of adverse situations when carrying out aviation activities in industry and air transportation. In addition, the probability of occurrence of errors of the first and second kind in the technological processes of tribodiagnostics of aviation gas turbine engines is reduced when implementing a method that has passed metrological examination in real practice. At the same time, the error in determining ratings and wear indicators provides acceptable accuracy indicators and sufficient reliability in assessing the technical condition of friction units of the D-30KP/KP2/KU/KU-154 aircraft engines.

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