RF MEMS design for phase shifters from K-band up to W-band

Author(s):  
V. Puyal ◽  
D. Dragomirescu ◽  
C. Villeneuve ◽  
J. Lattes ◽  
J. Ruan ◽  
...  
Keyword(s):  
Rf Mems ◽  
W Band ◽  
2009 ◽  
Author(s):  
V. Puyal ◽  
D. Dragomirescu ◽  
R. Plana
Keyword(s):  
Rf Mems ◽  
W Band ◽  

2010 ◽  
Vol 2 (3-4) ◽  
pp. 263-271 ◽  
Author(s):  
P. Farinelli ◽  
S. Bastioli ◽  
E. Chiuppesi ◽  
F. Di Maggio ◽  
B. Margesin ◽  
...  

This work presents the design, manufacturing, and testing of three 5-bit K-band Micro-Electro-Mechanical-Systems (MEMS) phase shifters based on similar architectures (combination of switched line and loaded line) but employing different MEMS switch typologies (cantilevers and air bridges) and RF junctions (SP2T and SP4T). All devices have been monolithically manufactured on 200 µm thick high resistivity silicon substrate (4″) by using the Fondazione Bruno Kessler (FBK) RF MEMS process. The performance of the different devices has been compared in order to identify the best configuration to be implemented in electronically steerable phased array antennas for satellite COTM (communication on the move) terminals. Excellent performances were measured for the dielectric-free pad RF MEMS switches as well as the single bits constituting the phase shifter. The three 5-bit devices show return losses better than 15 dB for all states, with average insertion loss of 3.5 dB for the clamped–clamped, SP2T-based design, 2.2 dB for the cantilever, SP2T-based device and 2.1 dB for the cantilever, SP4 T-based design. A low-cost Surface Mountable Technology (SMT) one-level package has been developed as well to allow the phase shifter integration into phased array antennas by using automatic surface mounting techniques. The design and simulation of the SMT package are also presented together with its measured RF performance.


2012 ◽  
Vol 19 (2) ◽  
pp. 237-244 ◽  
Author(s):  
Y. J. Du ◽  
J. F. Bao ◽  
J. W. Jiang

2012 ◽  
Vol 81 ◽  
pp. 65-74 ◽  
Author(s):  
Jacopo Iannacci ◽  
Giuseppe Resta ◽  
Paola Farinelli ◽  
Roberto Sorrentino

MEMS (MicroElectroMechanical-Systems) technology applied to the field of Radio Frequency systems (i.e. RF-MEMS) has emerged in the last 10-15 years as a valuable and viable solution to manufacture low-cost and very high-performance passive components, like variable capacitors, inductors and micro-relays, as well as complex networks, like tunable filters, reconfigurable impedance matching networks and phase shifters, and so on. The availability of such components and their integration within RF systems (e.g. radio transceivers, radars, satellites, etc.) enables boosting the characteristics and performance of telecommunication systems, addressing for instance a significant increase of their reconfigurability. The benefits resulting from the employment of RF-MEMS technology are paramount, being some of them the reduction of hardware redundancy and power consumption, along with the operability of the same RF system according to multiple standards. After framing more in detail the whole context of RF MEMS technology, this paper will provide a brief introduction on a typical RF-MEMS technology platform. Subsequently, some relevant examples of lumped RF MEMS passive elements and complex reconfigurable networks will be reported along with their measured RF performance and characteristics.


Author(s):  
V. Puyal ◽  
Cea Leti ◽  
Laas Cnrs ◽  
D. Titz

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