In-situ Microwave Characterization of Medium-k HfO2 and High-k STO Dielectrics for MIM Capacitors Integrated in Back-End of Line of IC

2007 ◽  
Author(s):  
T.T. Vo ◽  
T. Lacrevaz ◽  
B. Flechet ◽  
A. Farcy ◽  
Y. Morand ◽  
...  
Keyword(s):  
Microwave Characterization ◽  
High K ◽  
Mim Capacitors

Synthesis and Microwave Characterization of Polypyrrole-PVC Blends

1992 ◽  
Vol 247 ◽  
Author(s):  
F. Jousse ◽  
P. Hourquebie ◽  
C. Deleuze ◽  
L. Olmedo
Keyword(s):  
In Situ Growth ◽  
Oxidizing Agent ◽  
Direct Link ◽  
Reaction Parameters ◽  
Solvent Nature ◽  
Microwave Characterization ◽  
Agent Control ◽  
Thermoplastic Blends

ABSTRACT.: Thermoplastic blends have been created by in situ growth of polypyrrole in an insulating PVC matrix. This type of synthesis gives a level of conductivity of the order of 10−5 to 1 S/cm for concentrations of less than 15% (in weight). A study of the synthetic conditions shows that the reaction parameters (solvent, nature of oxidizing agent) control the eventual properties of the blend (structure, conductivity level). The microwave characterization of these materials has allowed us to establish a direct link between the method of processing and the radioelectric properties.

In situ microwave characterization of nonplanar dielectric objects

2000 ◽  
Vol 48 (3) ◽  
pp. 388-394 ◽  
Author(s):  
V.V. Varadan ◽  
K.A. Jose ◽  
V.K. Varadan
Keyword(s):  
Microwave Characterization ◽  
Dielectric Objects

Wideband frequency and in situ characterization of ultra thin ZrO2 and HfO2 films for integrated MIM capacitors

2010 ◽  
Vol 87 (3) ◽  
pp. 301-305 ◽  
Author(s):  
T. Bertaud ◽  
C. Bermond ◽  
T. Lacrevaz ◽  
C. Vallée ◽  
Y. Morand ◽  
...  
Keyword(s):  
In Situ Characterization ◽  
Mim Capacitors

In situ microwave characterization of microwire composites with external magnetic field

2012 ◽  
Vol 100 (19) ◽  
pp. 192903 ◽  
Author(s):  
F. X. Qin ◽  
C. Brosseau ◽  
H. X. Peng ◽  
H. Wang ◽  
J. Sun
Keyword(s):  
Magnetic Field ◽  
External Magnetic Field ◽  
Microwave Characterization

Wide band frequency and in situ characterization of high permittivity insulators (high-k) for high-speed integrated passives

2005 ◽  
Vol 82 (3-4) ◽  
pp. 548-553 ◽  
Author(s):  
T. Lacrevaz ◽  
B. Fléchet ◽  
A. Farcy ◽  
J. Torres ◽  
M. Gros-Jean ◽  
...  
Keyword(s):  
High Speed ◽  
Wide Band ◽  
In Situ Characterization ◽  
High Permittivity ◽  
Band Frequency ◽  
Integrated Passives ◽  
High K

In-situ characterization of Ga2O passivation of In0.53Ga0.47As prior to high-k dielectric atomic layer deposition

2011 ◽  
Vol 99 (4) ◽  
pp. 042904 ◽  
Author(s):  
M. Milojevic ◽  
R. Contreras-Guerrero ◽  
E. O’Connor ◽  
B. Brennan ◽  
P. K. Hurley ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
In Situ Characterization ◽  
Layer Deposition ◽  
High K ◽  
High K Dielectric

In-situ microwave characterization of planar/nonplanar specimens

1999 ◽  
Author(s):  
Vasundara V. Varadan ◽  
K. A. Jose ◽  
Vijay K. Varadan
Keyword(s):  
Microwave Characterization
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