In situ microwave characterization of insulator thin films for interconnects of advanced circuits
2004 ◽
Vol 1
(12)
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pp. 3744-3747
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Keyword(s):
2012 ◽
Vol 544
◽
pp. 34-38
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2002 ◽
Vol 97-98
◽
pp. 239-245
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2003 ◽
Vol 55
(1)
◽
pp. 939-946
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Keyword(s):