High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology

F. Ayazi; K. Najafi

doi:10.1109/84.870053

High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology

Journal of Microelectromechanical Systems ◽

10.1109/84.870053 ◽

2000 ◽

Vol 9 (3) ◽

pp. 288-294 ◽

Cited By ~ 118

Author(s):

F. Ayazi ◽

K. Najafi

Keyword(s):

Aspect Ratio ◽

Single Crystal ◽

High Aspect Ratio ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Mems Technology

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Ultra-high aspect ratio trenches in single crystal silicon with epitaxial gap tuning

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) ◽

10.1109/transducers.2013.6626732 ◽

2013 ◽

Cited By ~ 8

Author(s):

E. J. Ng ◽

C.-F. Chiang ◽

Y. Yang ◽

V. A. Hong ◽

C. H. Ahn ◽

...

Keyword(s):

Aspect Ratio ◽

Single Crystal ◽

High Aspect Ratio ◽

Single Crystal Silicon ◽

Crystal Silicon

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Fabrication and probabilistic fracture strength prediction of high-aspect-ratio single crystal silicon carbide microspecimens with stress concentration

Thin Solid Films ◽

10.1016/j.tsf.2006.01.041 ◽

2007 ◽

Vol 515 (6) ◽

pp. 3283-3290 ◽

Cited By ~ 17

Author(s):

N.N. Nemeth ◽

L.J. Evans ◽

O.M. Jadaan ◽

W.N. Sharpe ◽

G.M. Beheim ◽

...

Keyword(s):

Silicon Carbide ◽

Stress Concentration ◽

Aspect Ratio ◽

Single Crystal ◽

Fracture Strength ◽

High Aspect Ratio ◽

Single Crystal Silicon ◽

Strength Prediction ◽

Crystal Silicon

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Fabrication of high aspect ratio self-aligned stepped polysilicon electrode for single-crystal silicon microstructure

Microsystem Technologies ◽

10.1007/s00542-015-2755-5 ◽

2015 ◽

Vol 23 (5) ◽

pp. 1319-1325 ◽

Cited By ~ 5

Author(s):

Weilong You ◽

Lei Zhang ◽

Xiaofei Wang ◽

Wenshan Wei ◽

Weifeng Xia ◽

...

Keyword(s):

Aspect Ratio ◽

Single Crystal ◽

High Aspect Ratio ◽

Single Crystal Silicon ◽

Crystal Silicon

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Post-CMOS process for high-aspect-ratio monolithically integrated single crystal silicon microstructures

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. ◽

10.1109/sensor.2005.1497275 ◽

2005 ◽

Cited By ~ 1

Author(s):

Yong Zhu ◽

Guizhen Yan ◽

Jie Fan ◽

Xuesong Liu ◽

Jian Zhou ◽

...

Keyword(s):

Aspect Ratio ◽

Single Crystal ◽

High Aspect Ratio ◽

Single Crystal Silicon ◽

Cmos Process ◽

Crystal Silicon ◽

Monolithically Integrated ◽

Silicon Microstructures

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Thick single-crystal silicon MEMS with high-aspect-ratio vertical air gaps

10.1117/12.590750 ◽

2005 ◽

Cited By ~ 2

Author(s):

Pejman Monajemi ◽

Farrokh Ayazi

Keyword(s):

Aspect Ratio ◽

Single Crystal ◽

High Aspect Ratio ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Air Gaps

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A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure

Sensors and Actuators A Physical ◽

10.1016/j.sna.2010.08.015 ◽

2010 ◽

Vol 163 (1) ◽

pp. 159-163 ◽

Cited By ~ 17

Author(s):

Wei Jiang ◽

Xin Wang ◽

Jinwen Zhang

Keyword(s):

Aspect Ratio ◽

Single Crystal ◽

High Aspect Ratio ◽

Single Crystal Silicon ◽

Vacuum Gauge ◽

Crystal Silicon ◽

High Aspect Ratio Structure

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Anisotropic Single-Crystal Silicon Etching in High-Density RFIC Plasma with High Aspect Ratio and High Selectivity

1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1996a.12 ◽

1996 ◽

Author(s):

T. Pandhumsoporn ◽

K. Yu

Keyword(s):

Aspect Ratio ◽

Single Crystal ◽

High Aspect Ratio ◽

High Selectivity ◽

Single Crystal Silicon ◽

High Density ◽

Silicon Etching ◽

Crystal Silicon

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Fabrication of large arrays of high-aspect-ratio single-crystal silicon columns with isolated vertically aligned multi-walled carbon nanotube tips

Nanotechnology ◽

10.1088/0957-4484/19/40/405305 ◽

2008 ◽

Vol 19 (40) ◽

pp. 405305 ◽

Cited By ~ 3

Author(s):

L F Velásquez-García ◽

A I Akinwande

Keyword(s):

Carbon Nanotube ◽

Aspect Ratio ◽

Single Crystal ◽

High Aspect Ratio ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Multi Walled Carbon Nanotube ◽

Vertically Aligned

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Fabrication of multiple-level electrically isolated high-aspect-ratio single crystal silicon microstructures

Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures Sensors Actuators Machines and Robots MEMSYS-97 ◽

10.1109/memsys.1997.581892 ◽

2002 ◽

Cited By ~ 2

Author(s):

W. Hofmann ◽

N.C. MacDonald

Keyword(s):

Aspect Ratio ◽

Single Crystal ◽

High Aspect Ratio ◽

Single Crystal Silicon ◽

Multiple Level ◽

Crystal Silicon ◽

Silicon Microstructures

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Fabrication of high-aspect-ratio nanotips integrated with single-crystal silicon cantilevers

Nanotechnology ◽

10.1088/0957-4484/18/35/355305 ◽

2007 ◽

Vol 18 (35) ◽

pp. 355305 ◽

Cited By ~ 10

Author(s):

Henry J H Chen ◽

C S Hung

Keyword(s):

Aspect Ratio ◽

Single Crystal ◽

High Aspect Ratio ◽

Single Crystal Silicon ◽

Crystal Silicon

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