scholarly journals Timed Petri nets in modeling and analysis of cluster tools

2001 ◽  
Vol 17 (5) ◽  
pp. 562-575 ◽  
Author(s):  
W.M. Zuberek
2010 ◽  
Vol 12 (3) ◽  
pp. 253-266 ◽  
Author(s):  
NaiQi Wu ◽  
MengChu Zhou

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