Timed Petri nets in modeling and analysis of cluster tools
2001 ◽
Vol 17
(5)
◽
pp. 562-575
◽
2005 ◽
Vol 2
(1)
◽
pp. 92-93
◽
2004 ◽
Vol 17
(3)
◽
pp. 333-344
◽
1999 ◽
Vol 37
(11-12)
◽
pp. 191-206
◽
1999 ◽
Vol 44
(4)
◽
pp. 683-697
◽
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