Colored timed Petri nets for modeling and analysis of cluser tools
1999 ◽
Vol 37
(11-12)
◽
pp. 191-206
◽
2001 ◽
Vol 17
(5)
◽
pp. 562-575
◽
1999 ◽
Vol 44
(4)
◽
pp. 683-697
◽
Keyword(s):
2005 ◽
Vol 2
(1)
◽
pp. 92-93
◽