Defect detection algorithm for wafer inspection based on laser scanning

1997 ◽  
Vol 10 (4) ◽  
pp. 459-468 ◽  
Author(s):  
M. Nikoonahad ◽  
C.E. Wayman ◽  
S.A. Biellak
Keyword(s):  
Defect Detection ◽  
Laser Scanning ◽  
Detection Algorithm ◽  
Wafer Inspection

DEFECT DETECTION AND QUALITY ASSESSMENT OF HARDWOOD LOGS:PART 2—COMBINED ACOUSTIC AND LASER SCANNING SYSTEM

2018 ◽  
Vol 50 (3) ◽  
pp. 310-322 ◽  
Author(s):  
Xiping Wang ◽  
Ed Thomas ◽  
Feng Xu ◽  
Yunfei Liu ◽  
Brian K Brashaw ◽  
...  
Keyword(s):  
Quality Assessment ◽  
Defect Detection ◽  
Laser Scanning ◽  
Scanning System ◽  
Laser Scanning System

Lightweight detection algorithm for fine-grained surface defects of aerospace seal rings

2021 ◽  
pp. 1-18
Author(s):  
Hui Liu ◽  
Boxia He ◽  
Yong He ◽  
Xiaotian Tao
Keyword(s):  
Feature Extraction ◽  
Defect Detection ◽  
Surface Defect ◽  
Surface Defects ◽  
Detection Algorithm ◽  
Seal Ring ◽  
Fine Grained ◽  
Aerospace Applications ◽  
Surface Defect Detection ◽  
The Mean

The existing seal ring surface defect detection methods for aerospace applications have the problems of low detection efficiency, strong specificity, large fine-grained classification errors, and unstable detection results. Considering these problems, a fine-grained seal ring surface defect detection algorithm for aerospace applications is proposed. Based on analysis of the stacking process of standard convolution, heat maps of original pixels in the receptive field participating in the convolution operation are quantified and generated. According to the generated heat map, the feature extraction optimization method of convolution combinations with different dilation rates is proposed, and an efficient convolution feature extraction network containing three kinds of dilated convolutions is designed. Combined with the O-ring surface defect features, a multiscale defect detection network is designed. Before the head of multiscale classification and position regression, feature fusion tree modules are added to ensure the reuse and compression of the responsive features of different receptive fields on the same scale feature maps. Experimental results show that on the O-rings-3000 testing dataset, the mean condition accuracy of the proposed algorithm reaches 95.10% for 5 types of surface defects of aerospace O-rings. Compared with RefineDet, the mean condition accuracy of the proposed algorithm is only reduced by 1.79%, while the parameters and FLOPs are reduced by 35.29% and 64.90%, respectively. Moreover, the proposed algorithm has good adaptability to image blur and light changes caused by the cutting of imaging hardware, thus saving the cost.

Virtual-sample-based defect-detection algorithm for aluminum-tube surface

2021 ◽  
Author(s):  
Ning Lang ◽  
Decheng Wang ◽  
Peng Cheng ◽  
Shanchao Zuo ◽  
Pengfei Zhang
Keyword(s):  
Defect Detection ◽  
Detection Algorithm ◽  
Tube Surface ◽  
Virtual Sample ◽  
Aluminum Tube
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