Hybrid dry-wet chemical etching process for via holes for gallium arsenide MMIC manufacturing

E.Y. Chang; R.M. Nagarajan; C.J. Kryzak; K.P. Pande

doi:10.1109/66.17990

Hybrid dry-wet chemical etching process for via holes for gallium arsenide MMIC manufacturing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.17990 ◽

1988 ◽

Vol 1 (4) ◽

pp. 157-159 ◽

Cited By ~ 6

Author(s):

E.Y. Chang ◽

R.M. Nagarajan ◽

C.J. Kryzak ◽

K.P. Pande

Keyword(s):

Gallium Arsenide ◽

Chemical Etching ◽

Etching Process ◽

Via Holes ◽

Wet Chemical ◽

Wet Chemical Etching

Download Full-text

Surface characterization of patterning on MgO single crystals using wet chemical etching process to advance MEMS devices

Journal of Micromechanics and Microengineering ◽

10.1088/1361-6439/ab504d ◽

2019 ◽

Vol 30 (1) ◽

pp. 015001

Author(s):

Jia Liu ◽

Pianggang Jia ◽

Xiaoyong Chen ◽

Ting Liang ◽

Hao Liu ◽

...

Keyword(s):

Single Crystals ◽

Chemical Etching ◽

Surface Characterization ◽

Etching Process ◽

Mems Devices ◽

Wet Chemical ◽

Wet Chemical Etching

Download Full-text

Wet Chemical Etching Process of BST Thin Films for Pyroelectric Infrared Detectors

Ferroelectrics ◽

10.1080/00150193.2010.492740 ◽

2010 ◽

Vol 410 (1) ◽

pp. 137-144 ◽

Cited By ~ 5

Author(s):

Tianjin Zhang ◽

He Huang ◽

Ren Chen

Keyword(s):

Thin Films ◽

Infrared Detectors ◽

Chemical Etching ◽

Etching Process ◽

Bst Thin Films ◽

Wet Chemical ◽

Wet Chemical Etching

Download Full-text

Permittivity of LTCC substrates porousified with a wet chemical etching process

Procedia Engineering ◽

10.1016/j.proeng.2010.09.114 ◽

2010 ◽

Vol 5 ◽

pp. 327-330 ◽

Cited By ~ 3

Author(s):

Achim Bittner ◽

Ulrich Schmid

Keyword(s):

Chemical Etching ◽

Etching Process ◽

Wet Chemical ◽

Wet Chemical Etching

Download Full-text

Three-dimensional numerical simulation for anisotropic wet chemical etching process

Molecular Simulation ◽

10.1080/08927020601067508 ◽

2007 ◽

Vol 33 (7) ◽

pp. 593-597 ◽

Cited By ~ 1

Author(s):

J.-G. Lee ◽

T. Won

Keyword(s):

Numerical Simulation ◽

Chemical Etching ◽

Three Dimensional ◽

Etching Process ◽

Wet Chemical ◽

Wet Chemical Etching

Download Full-text

Wet chemical etching process for wafer scale isolation and interconnection of GaSb based device layers grown on GaAs substrates

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4801008 ◽

2013 ◽

Vol 31 (3) ◽

pp. 031204 ◽

Cited By ~ 3

Author(s):

Jung Min Kim ◽

Partha S. Dutta ◽

Eric Brown ◽

Jose M. Borrego ◽

Paul Greiff

Keyword(s):

Chemical Etching ◽

Etching Process ◽

Wafer Scale ◽

Gaas Substrates ◽

Wet Chemical ◽

Wet Chemical Etching

Download Full-text

Bromine/methanol wet chemical etching of via holes for InP microwave devices

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589863 ◽

1998 ◽

Vol 16 (2) ◽

pp. 561 ◽

Cited By ~ 4

Author(s):

S. Trassaert

Keyword(s):

Chemical Etching ◽

Microwave Devices ◽

Via Holes ◽

Wet Chemical ◽

Wet Chemical Etching

Download Full-text

Improving the sidewall quality of nanosecond laser-drilled deep through-silicon vias by incorporating a wet chemical etching process

Micro & Nano Letters ◽

10.1049/mnl.2012.0303 ◽

2012 ◽

Vol 7 (7) ◽

pp. 693 ◽

Cited By ~ 2

Author(s):

Chao-Wei Tang ◽

Kuan-Ming Li ◽

Hong-Tsu Young

Keyword(s):

Chemical Etching ◽

Etching Process ◽

Nanosecond Laser ◽

Through Silicon Vias ◽

Wet Chemical ◽

Wet Chemical Etching ◽

Silicon Vias

Download Full-text

Superconducting nanobridges prepared by a self-limiting wet chemical etching process

Superconductor Science and Technology ◽

10.1088/0953-2048/11/12/008 ◽

1998 ◽

Vol 11 (12) ◽

pp. 1397-1400 ◽

Cited By ~ 6

Author(s):

F-M Kamm ◽

A Plettl ◽

P Ziemann

Keyword(s):

Chemical Etching ◽

Etching Process ◽

Wet Chemical ◽

Wet Chemical Etching

Download Full-text

A 3-D Simulator for Silicon Anisotropic Wet Chemical Etching Process Based on Cellular Automata

Journal of Physics Conference Series ◽

10.1088/1742-6596/34/1/111 ◽

2006 ◽

Vol 34 ◽

pp. 674-679 ◽

Cited By ~ 6

Author(s):

Zai-Fa Zhou ◽

Qing-An Huang ◽

Wei-Hua Li ◽

Chi Zhu

Keyword(s):

Cellular Automata ◽

Chemical Etching ◽

Etching Process ◽

Wet Chemical ◽

Wet Chemical Etching

Download Full-text

A total concentration fixed-grid method for wet chemical etching process

10.32657/10356/36008 ◽

2007 ◽

Author(s):

Rath Prasenjit

Keyword(s):

Chemical Etching ◽

Total Concentration ◽

Grid Method ◽

Etching Process ◽

Fixed Grid ◽

Wet Chemical ◽

Wet Chemical Etching

Download Full-text