scholarly journals A rod-shaped vibro touch sensor using PZT thin film

1999 ◽  
Vol 46 (4) ◽  
pp. 875-882 ◽  
Author(s):  
T. Kanda ◽  
T. Morita ◽  
M.K. Kurosawa ◽  
T. Higuchi
Keyword(s):  
Thin Film ◽  
Touch Sensor ◽  
Pzt Thin Film

Microtouch-Sensor Array Fabricated by Hydrothermal Method

2002 ◽  
Vol 14 (6) ◽  
pp. 633-639
Author(s):  
Guiryong Kwon ◽  
◽  
Fumihito Arai ◽  
Toshio Fukuda ◽  
Kouichi ltoigawa ◽  
...  
Keyword(s):  
Thin Film ◽  
High Temperature ◽  
Resonance Frequency ◽  
Hydrothermal Method ◽  
Sensor Array ◽  
Impedance Change ◽  
Touch Sensor ◽  
Pzt Thin Film ◽  
Before And After ◽  
Basic Features

We propose a microtouch-sensor array applicable in high-temperature environments. PZT thin film was fabricated on a Ti substrate by a hydrothermal method and electrodes were deposited on it to form the sensor and actuator. The actuator is driven at a resonance frequency of 1.045 [kHz] and actuating voltage is low at ±5[V]. The sensor detects impedance change before and after contact. The sensor is simple and easy to miniaturize and works at temperature up to 82°C. This sensor can be used as an automobile control touch-sensor pad instead of conventional capacitive touch pads because it is robust against high temperature. We detail the sensor's basic features.

Voice-supported Active Touch Panel Using Micro Touch Sensor with PZT Thin Film

2003 ◽  
Vol 15 (4) ◽  
pp. 384-390
Author(s):  
Gui Ryong Kwon ◽  
◽  
Fumihito Arai ◽  
Toshio Fukuda ◽  
Koichi Itoigawa ◽  
...  
Keyword(s):  
Thin Film ◽  
Active Touch ◽  
Online Information ◽  
Navigation Systems ◽  
Touch Panel ◽  
Thin Film Sensors ◽  
Touch Sensor ◽  
Pzt Thin Film ◽  
The Many ◽  
The Voice

Today's automobiles serve not only as vehicles but also as mobile offices combining communication tools such as cellphones and car navigation systems providing online information services. The many switches are conventionally distributed on the dashboard. A move is under way, however, to combine them into a multifunctional touch panel. We propose a voice-supported active touch panel. Since information feedback to the operator is important in ensuring correct function selection, the panel we designed combines a vibrator and voice explanation. Touch sensors use PZT thin film sensors. The voice explanation uses a quick response system. This paper reports the features and configuration of the voice-supported active touch panel.

Spalling Technology of PZT Thin Film Capacitor using Internal Stress

2014 ◽  
Vol 134 (4) ◽  
pp. 85-89
Author(s):  
Kazutaka Sueshige ◽  
Fumiaki Honda ◽  
Tadatomo Suga ◽  
Masaaki Ichiki ◽  
Toshihiro Itoh
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Pzt Thin Film

Piezoelectric PZT thin-film transformers with a ring–dot structure

2020 ◽  
Vol 59 (SP) ◽  
pp. SPPD09
Author(s):  
Sang-Hyo Kweon ◽  
Kazuki Tani ◽  
Kensuke Kanda ◽  
Sahn Nahm ◽  
Isaku Kanno
Keyword(s):  
Thin Film ◽  
Pzt Thin Film

Measurement of d15 Shear-Mode Piezoelectric Response in PZT Thin Film

2009 ◽  
Vol 421-422 ◽  
pp. 95-98
Author(s):  
Tsuyoshi Aoki ◽  
Shigeyoshi Umemiya ◽  
Masaharu Hida ◽  
Kazuaki Kurihara
Keyword(s):  
Thin Film ◽  
Fem Analysis ◽  
Active Part ◽  
Piezoelectric Response ◽  
Small Displacement ◽  
Shear Mode ◽  
Mems Devices ◽  
Pzt Film ◽  
Pzt Thin Film ◽  
Piezoelectric Constants

Piezoelectric films using d15 shear-mode can be applied to many useful MEMS devices. The small displacement derived from the d15 shear-mode was directly observed by a SPM measurement. An isolated PZT(52/48) active part having a pair of driving Cu electrodes was processed in a 5 m-thick sputtering film. The displacement measurement of the active part and its FEM analysis suggested that the estimated d15 piezoelectric constant of the film was 590 pm/V. And, the d31 value of the film was -120 pm/V measured by a conventional cantilever method. The obtained piezoelectric constants of the PZT film are near those of bulk.

Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors

2001 ◽  
Vol 92 (1-3) ◽  
pp. 156-160 ◽  
Author(s):  
Korbinian Kunz ◽  
Peter Enoksson ◽  
Göran Stemme
Keyword(s):  
Thin Film ◽  
Pzt Thin Film ◽  
Highly Sensitive

Correlations Among Degradations in Lead Zirconate Titanate thin Film Capacitors

1993 ◽  
Vol 310 ◽  
Author(s):  
In K. Yoo ◽  
Seshu B. Desu ◽  
Jimmy Xing
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Lead Zirconate Titanate ◽  
Oxygen Vacancies ◽  
Lead Zirconate ◽  
Electrical Degradation ◽  
Zirconate Titanate ◽  
Thin Film Capacitors ◽  
Pzt Thin Film ◽  
Degradation Properties

AbstractMany attempts have been made to reduce degradation properties of Lead Zirconate Titanate (PZT) thin film capacitors. Although each degradation property has been studied extensively for the sake of material improvement, it is desired that they be understood in a unified manner in order to reduce degradation properties simultaneously. This can be achieved if a common source(s) of degradations is identified and controlled. In the past it was noticed that oxygen vacancies play a key role in fatigue, leakage current, and electrical degradation/breakdown of PZT films. It is now known that space charges (oxygen vacancies, mainly) affect ageing, too. Therefore, a quantitative ageing mechanism is proposed based on oxygen vacancy migration under internal field generated by either remanent polarization or spontaneous polarization. Fatigue, leakage current, electrical degradation, and polarization reversal mechanisms are correlated with the ageing mechanism in order to establish guidelines for simultaneous degradation control of PZT thin film capacitors. In addition, the current pitfalls in the ferroelectric test circuit is discussed, which may cause false retention, imprint, and ageing.

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