Polysilicon thin-film transistors using self-aligned cobalt and nickel silicide source and drain contacts

1999 ◽  
Vol 20 (7) ◽  
pp. 332-334 ◽  
Author(s):  
G.T. Sarcona ◽  
M. Stewart ◽  
M.K. Hatalis
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Nickel Silicide ◽  
Cobalt And Nickel

Polysilicon Thin Film Transistors with Cobalt amd Nickel Silicide Source and Drain Contacts

1996 ◽  
Vol 424 ◽  
Author(s):  
G. T. Sarcona ◽  
M. K. Hatalis
Keyword(s):  
Thin Film ◽  
Contact Resistance ◽  
Sheet Resistance ◽  
Leakage Current ◽  
Thin Film Transistors ◽  
Nickel Silicide ◽  
Polysilicon Films ◽  
Polysilicon Tft ◽  
Extrinsic Resistance ◽  
Cobalt And Nickel

AbstractPolysilicon n-type thin film transistors have been fabricated with self-aligned cobalt and nickel silicide contacts to the source and drain regions. The sheet resistance of the source and drain without silicide is above 200 Ω/‪. The cobalt and nickel silicide films have sheet resistance below 30 Ω/‪. The contact resistance of the silicided devices is also much lower. The reduced extrinsic resistance is shown to improve the current in the “on” state, without increasing the leakage current. This study includes examination of cobalt and nickel silicidation on thin polysilicon films at temperatures compatible with polysilicon TFT-LCD processes.

Thermal Stress Effect on Nickel Silicide Seed-Induced Laterally Crystallized Polycrystalline-Silicon Thin-Film Transistors

2016 ◽  
Vol 16 (9) ◽  
pp. 9756-9760 ◽  
Author(s):  
Hyung Yoon Kim ◽  
Jae Hyo Park ◽  
Ki Hwan Seok ◽  
Zohreh Kiaee ◽  
Hee Jae Chae ◽  
...  
Keyword(s):  
Thin Film ◽  
Thermal Stress ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Nickel Silicide ◽  
Stress Effect ◽  
Silicon Thin Film

Bottom-gate poly-Si thin-film transistors by nickel silicide seed-induced lateral crystallization with self-aligned lightly doped layer

2017 ◽  
Vol 129 ◽  
pp. 6-9 ◽  
Author(s):  
Sol Kyu Lee ◽  
Ki Hwan Seok ◽  
Hee Jae Chae ◽  
Yong Hee Lee ◽  
Ji Su Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Nickel Silicide ◽  
Lateral Crystallization ◽  
Si Thin Film ◽  
Bottom Gate

Effect of nickel silicide gettering on metal-induced crystallized polycrystalline-silicon thin-film transistors

2017 ◽  
Vol 132 ◽  
pp. 73-79 ◽  
Author(s):  
Hyung Yoon Kim ◽  
Ki Hwan Seok ◽  
Hee Jae Chae ◽  
Sol Kyu Lee ◽  
Yong Hee Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Nickel Silicide ◽  
Silicon Thin Film

Effective performance improvement of organic thin film transistors with multi-layer modifications

2020 ◽  
Vol 91 (3) ◽  
pp. 30201
Author(s):  
Hang Yu ◽  
Jianlin Zhou ◽  
Yuanyuan Hao ◽  
Yao Ni
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Performance Enhancement ◽  
Organic Thin Film Transistors ◽  
Electrical Performance ◽  
Hole Injection ◽  
Organic Thin Film ◽  
Effective Performance ◽  
Significant Performance ◽  
P Type

Organic thin film transistors (OTFTs) based on dioctylbenzothienobenzothiophene (C8BTBT) and copper (Cu) electrodes were fabricated. For improving the electrical performance of the original devices, the different modifications were attempted to insert in three different positions including semiconductor/electrode interface, semiconductor bulk inside and semiconductor/insulator interface. In detail, 4,4′,4′′-tris[3-methylpheny(phenyl)amino] triphenylamine (m-MTDATA) was applied between C8BTBTand Cu electrodes as hole injection layer (HIL). Moreover, the fluorinated copper phthalo-cyanine (F16CuPc) was inserted in C8BTBT/SiO2 interface to form F16CuPc/C8BTBT heterojunction or C8BTBT bulk to form C8BTBT/F16CuPc/C8BTBT sandwich configuration. Our experiment shows that, the sandwich structured OTFTs have a significant performance enhancement when appropriate thickness modification is chosen, comparing with original C8BTBT devices. Then, even the low work function metal Cu was applied, a normal p-type operate-mode C8BTBT-OTFT with mobility as high as 2.56 cm2/Vs has been fabricated.

A Proposal of High Performance Organic Thin Film Transistors

2010 ◽  
Vol 130 (2) ◽  
pp. 161-166
Author(s):  
Yoshinori Ishikawa ◽  
Yasuo Wada ◽  
Toru Toyabe ◽  
Ken Tsutsui
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
High Performance ◽  
Organic Thin Film Transistors ◽  
Organic Thin Film

High Sensitivity pH Sensors based on Amorphous Indium-gallium-zinc Oxide Thin-film Transistors

2015 ◽  
Vol 135 (6) ◽  
pp. 192-198 ◽  
Author(s):  
Shinnosuke Iwamatsu ◽  
Yutaka Abe ◽  
Toru Yahagi ◽  
Seiya Kobayashi ◽  
Kazushige Takechi ◽  
...  
Keyword(s):  
Thin Film ◽  
Zinc Oxide ◽  
Thin Film Transistors ◽  
High Sensitivity ◽  
Oxide Thin Film ◽  
Indium Gallium Zinc Oxide ◽  
Ph Sensors ◽  
Zinc Oxide Thin Film ◽  
Indium Gallium

Effect of Illumination on Organic Polymer Thin-Film Transistors

2003 ◽  
Vol 771 ◽  
Author(s):  
Michael C. Hamilton ◽  
Sandrine Martin ◽  
Jerzy Kanicki
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Drain Current ◽  
Charge Carriers ◽  
Electrical Performance ◽  
Organic Polymer ◽  
Light Illumination ◽  
Polymer Thin Film ◽  
Channel Region ◽  
White Light Illumination

AbstractWe have investigated the effects of white-light illumination on the electrical performance of organic polymer thin-film transistors (OP-TFTs). The OFF-state drain current is significantly increased, while the drain current in the strong accumulation regime is relatively unaffected. At the same time, the threshold voltage is decreased and the subthreshold slope is increased, while the field-effect mobility of the charge carriers is not affected. The observed effects are explained in terms of the photogeneration of free charge carriers in the channel region due to the absorbed photons.

Photo-Induced Threshold and Onset Voltage Shifts in Organic Thin-Film Transistors

2013 ◽  
Vol E96.C (11) ◽  
pp. 1360-1366 ◽  
Author(s):  
Ichiro FUJIEDA ◽  
Tse Nga NG ◽  
Tomoya HOSHINO ◽  
Tomonori HANASAKI
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Organic Thin Film Transistors ◽  
Organic Thin Film ◽  
Onset Voltage
Sign in / Sign up

Export Citation Format

Share Document