Characterization of bolometers based on polycrystalline silicon germanium alloys

1998 ◽  
Vol 19 (10) ◽  
pp. 376-378 ◽  
Author(s):  
S. Sedky ◽  
P. Fiorini ◽  
M. Caymax ◽  
C. Baert ◽  
L. Hermans ◽  
...  
Keyword(s):  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Silicon Germanium Alloys

Microstructural characterization of rf sputtered polycrystalline silicon germanium films

2002 ◽  
Vol 91 (1) ◽  
pp. 444 ◽  
Author(s):  
W. K. Choi ◽  
L. K. Teh ◽  
L. K. Bera ◽  
W. K. Chim ◽  
A. T. S Wee ◽  
...  
Keyword(s):  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Microstructural Characterization ◽  
Germanium Films

Tungsten silicide contacts to polycrystalline silicon and silicon–germanium alloys

2004 ◽  
Vol 114-115 ◽  
pp. 223-227 ◽  
Author(s):  
G. Srinivasan ◽  
M.F. Bain ◽  
S. Bhattacharyya ◽  
P. Baine ◽  
B.M. Armstrong ◽  
...  
Keyword(s):  
Silicon Germanium ◽  
Polycrystalline Silicon ◽  
Tungsten Silicide ◽  
Silicon Germanium Alloys
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