A new fabrication process of field emitter arrays with submicron gate apertures using local oxidation of silicon

Chun Gyoo Lee;  Byung Gook Park;  Jong Duk Lee

doi:10.1109/55.485185

A new fabrication process of field emitter arrays with submicron gate apertures using local oxidation of silicon

IEEE Electron Device Letters ◽

10.1109/55.485185 ◽

1996 ◽

Vol 17 (3) ◽

pp. 115-117 ◽

Cited By ~ 8

Author(s):

Chun Gyoo Lee ◽

Byung Gook Park ◽

Jong Duk Lee

Keyword(s):

Fabrication Process ◽

Field Emitter ◽

Field Emitter Arrays ◽

Local Oxidation

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Fabrication process of field emitter arrays using focused ion and electron beam induced reaction

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1349205 ◽

2001 ◽

Vol 19 (3) ◽

pp. 933 ◽

Cited By ~ 18

Author(s):

C. Ochiai ◽

O. Yavas ◽

M. Takai ◽

A. Hosono ◽

S. Okuda

Keyword(s):

Electron Beam ◽

Fabrication Process ◽

Field Emitter ◽

Field Emitter Arrays ◽

Induced Reaction

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A New Fabrication Process Of Field Emitter Arrays Using Silicon Delamination By Hydrogen Ion Implantation

Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135) ◽

10.1109/imnc.1998.729970 ◽

1998 ◽

Keyword(s):

Ion Implantation ◽

Fabrication Process ◽

Hydrogen Ion ◽

Field Emitter ◽

Field Emitter Arrays ◽

Hydrogen Ion Implantation

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Field-Emitter Arrays for RF Vacuum Microelectronics

10.21236/ada248726 ◽

1992 ◽

Author(s):

C. A. Spindt ◽

A. Rosengreen

Keyword(s):

Field Emitter ◽

Field Emitter Arrays ◽

Vacuum Microelectronics

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Beam collimation from field-emitter arrays with linear planar lens

IEEE Conference Record - Abstracts. 1996 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1996.551467 ◽

2002 ◽

Cited By ~ 1

Author(s):

C.-M. Tang ◽

T.A. Swyden

Keyword(s):

Field Emitter ◽

Planar Lens ◽

Field Emitter Arrays ◽

Beam Collimation

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Optically stimulated picosecond field emission pulses from gated p-silicon field emitter arrays

Applied Physics Letters ◽

10.1063/1.2710475 ◽

2007 ◽

Vol 90 (8) ◽

pp. 083506 ◽

Cited By ~ 14

Author(s):

Chin-Jen Chiang ◽

Kendrick X. Liu ◽

Jonathan P. Heritage

Keyword(s):

Field Emission ◽

Field Emitter ◽

Field Emitter Arrays

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Fabrication of Gated Field Emitter Arrays with Self-Align Lateral Resistors

10th International Conference on Vacuum Microelectronics ◽

10.1109/ivmc.1997.627661 ◽

1997 ◽

Keyword(s):

Field Emitter ◽

Field Emitter Arrays

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Field-emission characteristics of single- and double-gate all-metallic field emitter arrays fabricated by molding and self-aligned gate process

2009 22nd International Vacuum Nanoelectronics Conference ◽

10.1109/ivnc.2009.5271650 ◽

2009 ◽

Cited By ~ 1

Author(s):

S. Tsujino ◽

E. Kirk ◽

T. Vogel ◽

J. Gobrecht

Keyword(s):

Field Emission ◽

Emission Characteristics ◽

Double Gate ◽

Field Emitter ◽

Field Emitter Arrays

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Fabrication and Characterization of Diamond-Clad Silicon Field Emitter Arrays

Japanese Journal of Applied Physics ◽

10.1143/jjap.34.6926 ◽

1995 ◽

Vol 34 (Part 1, No. 12B) ◽

pp. 6926-6931 ◽

Cited By ~ 16

Author(s):

Huang-Chung Cheng ◽

Tzu-Kun Ku ◽

Biing-Bang Hsieh ◽

Sheng-Hsiung Chen ◽

Shye-Yuh Leu ◽

...

Keyword(s):

Field Emitter ◽

Field Emitter Arrays ◽

Fabrication And Characterization

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Effect of electrical aging on field emission from carbon nanotube field emitter arrays

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2884757 ◽

2008 ◽

Vol 26 (2) ◽

pp. 856 ◽

Cited By ~ 22

Author(s):

Je Hwang Ryu ◽

Ki Seo Kim ◽

Chang Seok Lee ◽

Jin Jang ◽

Kyu Chang Park

Keyword(s):

Carbon Nanotube ◽

Field Emission ◽

Field Emitter ◽

Field Emitter Arrays ◽

Electrical Aging

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Analysis of the possibility of performing microelectronic microwave vacuum devices with extended interaction on field emitter arrays

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586844 ◽

1993 ◽

Vol 11 (2) ◽

pp. 477 ◽

Cited By ~ 6

Author(s):

N. I. Sinitsyn

Keyword(s):

Field Emitter ◽

Field Emitter Arrays ◽

Extended Interaction

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